3/19/2010	12:02:17 AM	H2 valve closed
3/19/2010	12:02:17 AM	BCl3 valve closed
3/19/2010	12:02:17 AM	PH3 valve closed
3/19/2010	12:02:17 AM	SiCl4 pre valve closed
3/19/2010	12:02:17 AM	SiCl4 post valve closed
3/19/2010	12:02:17 AM	Main Vac valve closed
3/19/2010	12:02:17 AM	Bypass valve closed
3/19/2010	12:02:17 AM	Bubbler valve closed
3/19/2010	12:02:17 AM	Helium valve opened
3/19/2010	12:02:17 AM	Helium MFC set to  500.000000
3/19/2010	12:02:17 AM	H2 MFC set to  0.000000
3/19/2010	12:02:17 AM	BCl3 MFC set to  0.000000
3/19/2010	12:02:17 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:02:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:02:17 AM	Tube furnace set to 0
3/19/2010	12:03:34 AM	Helium valve closed
3/19/2010	12:03:34 AM	H2 valve closed
3/19/2010	12:03:34 AM	BCl3 valve closed
3/19/2010	12:03:34 AM	PH3 valve closed
3/19/2010	12:03:34 AM	SiCl4 pre valve closed
3/19/2010	12:03:34 AM	SiCl4 post valve closed
3/19/2010	12:03:34 AM	Main Vac valve closed
3/19/2010	12:03:34 AM	Bypass valve closed
3/19/2010	12:03:34 AM	Bubbler valve closed
3/19/2010	12:03:34 AM	Helium MFC set to  0.000000
3/19/2010	12:03:34 AM	H2 MFC set to  0.000000
3/19/2010	12:03:34 AM	BCl3 MFC set to  0.000000
3/19/2010	12:03:34 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:03:34 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:03:34 AM	Tube furnace set to 0
3/19/2010	12:03:49 AM	Helium valve closed
3/19/2010	12:03:49 AM	H2 valve closed
3/19/2010	12:03:49 AM	BCl3 valve closed
3/19/2010	12:03:49 AM	PH3 valve closed
3/19/2010	12:03:49 AM	SiCl4 pre valve closed
3/19/2010	12:03:49 AM	SiCl4 post valve closed
3/19/2010	12:03:49 AM	Main Vac valve closed
3/19/2010	12:03:49 AM	Bubbler valve closed
3/19/2010	12:03:49 AM	Bypass valve opened
3/19/2010	12:03:49 AM	Helium MFC set to  0.000000
3/19/2010	12:03:49 AM	H2 MFC set to  0.000000
3/19/2010	12:03:49 AM	BCl3 MFC set to  0.000000
3/19/2010	12:03:49 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:03:49 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:03:49 AM	Tube furnace set to 0
3/19/2010	12:04:10 AM	Helium valve closed
3/19/2010	12:04:10 AM	H2 valve closed
3/19/2010	12:04:10 AM	BCl3 valve closed
3/19/2010	12:04:10 AM	PH3 valve closed
3/19/2010	12:04:10 AM	SiCl4 pre valve closed
3/19/2010	12:04:10 AM	SiCl4 post valve closed
3/19/2010	12:04:10 AM	Bubbler valve closed
3/19/2010	12:04:10 AM	Main Vac valve opened
3/19/2010	12:04:10 AM	Bypass valve opened
3/19/2010	12:04:10 AM	Helium MFC set to  0.000000
3/19/2010	12:04:10 AM	H2 MFC set to  0.000000
3/19/2010	12:04:10 AM	BCl3 MFC set to  0.000000
3/19/2010	12:04:10 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:04:10 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:04:10 AM	Tube furnace set to 0
3/19/2010	12:09:10 AM	H2 valve closed
3/19/2010	12:09:10 AM	BCl3 valve closed
3/19/2010	12:09:10 AM	PH3 valve closed
3/19/2010	12:09:10 AM	SiCl4 pre valve closed
3/19/2010	12:09:10 AM	SiCl4 post valve closed
3/19/2010	12:09:10 AM	Main Vac valve closed
3/19/2010	12:09:10 AM	Bypass valve closed
3/19/2010	12:09:10 AM	Bubbler valve closed
3/19/2010	12:09:10 AM	Helium valve opened
3/19/2010	12:09:10 AM	Helium MFC set to  500.000000
3/19/2010	12:09:10 AM	H2 MFC set to  0.000000
3/19/2010	12:09:10 AM	BCl3 MFC set to  0.000000
3/19/2010	12:09:11 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:09:11 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:09:11 AM	Tube furnace set to 0
3/19/2010	12:10:28 AM	Helium valve closed
3/19/2010	12:10:28 AM	H2 valve closed
3/19/2010	12:10:28 AM	BCl3 valve closed
3/19/2010	12:10:28 AM	PH3 valve closed
3/19/2010	12:10:28 AM	SiCl4 pre valve closed
3/19/2010	12:10:28 AM	SiCl4 post valve closed
3/19/2010	12:10:28 AM	Main Vac valve closed
3/19/2010	12:10:28 AM	Bypass valve closed
3/19/2010	12:10:28 AM	Bubbler valve closed
3/19/2010	12:10:28 AM	Helium MFC set to  0.000000
3/19/2010	12:10:28 AM	H2 MFC set to  0.000000
3/19/2010	12:10:28 AM	BCl3 MFC set to  0.000000
3/19/2010	12:10:28 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:10:28 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:10:28 AM	Tube furnace set to 0
3/19/2010	12:10:43 AM	Helium valve closed
3/19/2010	12:10:43 AM	H2 valve closed
3/19/2010	12:10:43 AM	BCl3 valve closed
3/19/2010	12:10:43 AM	PH3 valve closed
3/19/2010	12:10:43 AM	SiCl4 pre valve closed
3/19/2010	12:10:43 AM	SiCl4 post valve closed
3/19/2010	12:10:43 AM	Main Vac valve closed
3/19/2010	12:10:43 AM	Bubbler valve closed
3/19/2010	12:10:43 AM	Bypass valve opened
3/19/2010	12:10:43 AM	Helium MFC set to  0.000000
3/19/2010	12:10:43 AM	H2 MFC set to  0.000000
3/19/2010	12:10:43 AM	BCl3 MFC set to  0.000000
3/19/2010	12:10:43 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:10:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:10:43 AM	Tube furnace set to 0
3/19/2010	12:11:04 AM	Helium valve closed
3/19/2010	12:11:04 AM	H2 valve closed
3/19/2010	12:11:04 AM	BCl3 valve closed
3/19/2010	12:11:04 AM	PH3 valve closed
3/19/2010	12:11:04 AM	SiCl4 pre valve closed
3/19/2010	12:11:04 AM	SiCl4 post valve closed
3/19/2010	12:11:04 AM	Bubbler valve closed
3/19/2010	12:11:04 AM	Main Vac valve opened
3/19/2010	12:11:04 AM	Bypass valve opened
3/19/2010	12:11:04 AM	Helium MFC set to  0.000000
3/19/2010	12:11:04 AM	H2 MFC set to  0.000000
3/19/2010	12:11:04 AM	BCl3 MFC set to  0.000000
3/19/2010	12:11:04 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:11:04 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:11:04 AM	Tube furnace set to 0
3/19/2010	12:16:04 AM	Helium valve closed
3/19/2010	12:16:04 AM	H2 valve closed
3/19/2010	12:16:04 AM	BCl3 valve closed
3/19/2010	12:16:04 AM	PH3 valve closed
3/19/2010	12:16:04 AM	SiCl4 pre valve closed
3/19/2010	12:16:04 AM	SiCl4 post valve closed
3/19/2010	12:16:04 AM	Bubbler valve closed
3/19/2010	12:16:04 AM	Main Vac valve opened
3/19/2010	12:16:04 AM	Bypass valve opened
3/19/2010	12:16:04 AM	Helium MFC set to  0.000000
3/19/2010	12:16:04 AM	H2 MFC set to  0.000000
3/19/2010	12:16:04 AM	BCl3 MFC set to  0.000000
3/19/2010	12:16:04 AM	SiCl4 MFC set to  0.000000
3/19/2010	12:16:04 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:16:04 AM	Tube furnace set to 0
3/19/2010	12:16:05 AM	Run finished at 12:16 AM
3/19/2010	12:16:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	7:43:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	7:43:32 AM	Recipe started at 7:43 AM
3/19/2010	7:43:32 AM	H2 valve closed
3/19/2010	7:43:32 AM	BCl3 valve closed
3/19/2010	7:43:32 AM	PH3 valve closed
3/19/2010	7:43:32 AM	SiCl4 pre valve closed
3/19/2010	7:43:32 AM	SiCl4 post valve closed
3/19/2010	7:43:32 AM	Main Vac valve closed
3/19/2010	7:43:32 AM	Bypass valve closed
3/19/2010	7:43:32 AM	Bubbler valve closed
3/19/2010	7:43:32 AM	Helium valve opened
3/19/2010	7:43:32 AM	Helium MFC set to  500.000000
3/19/2010	7:43:32 AM	H2 MFC set to  0.000000
3/19/2010	7:43:32 AM	BCl3 MFC set to  0.000000
3/19/2010	7:43:32 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:43:32 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:43:32 AM	Tube furnace set to 0
3/19/2010	7:44:53 AM	Helium valve closed
3/19/2010	7:44:53 AM	H2 valve closed
3/19/2010	7:44:53 AM	BCl3 valve closed
3/19/2010	7:44:53 AM	PH3 valve closed
3/19/2010	7:44:53 AM	SiCl4 pre valve closed
3/19/2010	7:44:53 AM	SiCl4 post valve closed
3/19/2010	7:44:53 AM	Main Vac valve closed
3/19/2010	7:44:53 AM	Bypass valve closed
3/19/2010	7:44:53 AM	Bubbler valve closed
3/19/2010	7:44:53 AM	Helium MFC set to  0.000000
3/19/2010	7:44:53 AM	H2 MFC set to  0.000000
3/19/2010	7:44:53 AM	BCl3 MFC set to  0.000000
3/19/2010	7:44:53 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:44:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:44:53 AM	Tube furnace set to 0
3/19/2010	7:44:53 AM	Run finished at 7:44 AM
3/19/2010	7:44:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	7:49:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	7:49:32 AM	Recipe started at 7:49 AM
3/19/2010	7:49:32 AM	Helium valve closed
3/19/2010	7:49:32 AM	H2 valve closed
3/19/2010	7:49:32 AM	BCl3 valve closed
3/19/2010	7:49:32 AM	PH3 valve closed
3/19/2010	7:49:32 AM	SiCl4 pre valve closed
3/19/2010	7:49:32 AM	SiCl4 post valve closed
3/19/2010	7:49:32 AM	Main Vac valve closed
3/19/2010	7:49:32 AM	Bubbler valve closed
3/19/2010	7:49:32 AM	Bypass valve opened
3/19/2010	7:49:32 AM	Helium MFC set to  0.000000
3/19/2010	7:49:32 AM	H2 MFC set to  0.000000
3/19/2010	7:49:32 AM	BCl3 MFC set to  0.000000
3/19/2010	7:49:32 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:49:32 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:49:32 AM	Tube furnace set to 0
3/19/2010	7:50:03 AM	Helium valve closed
3/19/2010	7:50:03 AM	H2 valve closed
3/19/2010	7:50:03 AM	BCl3 valve closed
3/19/2010	7:50:03 AM	PH3 valve closed
3/19/2010	7:50:03 AM	SiCl4 pre valve closed
3/19/2010	7:50:03 AM	SiCl4 post valve closed
3/19/2010	7:50:03 AM	Bubbler valve closed
3/19/2010	7:50:03 AM	Main Vac valve opened
3/19/2010	7:50:03 AM	Bypass valve opened
3/19/2010	7:50:03 AM	Helium MFC set to  0.000000
3/19/2010	7:50:03 AM	H2 MFC set to  0.000000
3/19/2010	7:50:03 AM	BCl3 MFC set to  0.000000
3/19/2010	7:50:03 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:50:03 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:50:03 AM	Tube furnace set to 0
3/19/2010	7:50:03 AM	Run finished at 7:50 AM
3/19/2010	7:50:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	7:52:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	7:52:29 AM	Recipe started at 7:52 AM
3/19/2010	7:52:29 AM	H2 valve closed
3/19/2010	7:52:29 AM	BCl3 valve closed
3/19/2010	7:52:29 AM	PH3 valve closed
3/19/2010	7:52:29 AM	SiCl4 pre valve closed
3/19/2010	7:52:29 AM	SiCl4 post valve closed
3/19/2010	7:52:29 AM	Main Vac valve closed
3/19/2010	7:52:29 AM	Bypass valve closed
3/19/2010	7:52:29 AM	Bubbler valve closed
3/19/2010	7:52:29 AM	Helium valve opened
3/19/2010	7:52:29 AM	Helium MFC set to  500.000000
3/19/2010	7:52:29 AM	H2 MFC set to  0.000000
3/19/2010	7:52:29 AM	BCl3 MFC set to  0.000000
3/19/2010	7:52:29 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:52:30 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:52:30 AM	Tube furnace set to 0
3/19/2010	7:53:53 AM	Helium valve closed
3/19/2010	7:53:53 AM	H2 valve closed
3/19/2010	7:53:53 AM	BCl3 valve closed
3/19/2010	7:53:53 AM	PH3 valve closed
3/19/2010	7:53:53 AM	SiCl4 pre valve closed
3/19/2010	7:53:53 AM	SiCl4 post valve closed
3/19/2010	7:53:53 AM	Main Vac valve closed
3/19/2010	7:53:53 AM	Bypass valve closed
3/19/2010	7:53:53 AM	Bubbler valve closed
3/19/2010	7:53:53 AM	Helium MFC set to  0.000000
3/19/2010	7:53:53 AM	H2 MFC set to  0.000000
3/19/2010	7:53:53 AM	BCl3 MFC set to  0.000000
3/19/2010	7:53:53 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:53:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:53:53 AM	Tube furnace set to 0
3/19/2010	7:54:08 AM	Helium valve closed
3/19/2010	7:54:08 AM	H2 valve closed
3/19/2010	7:54:08 AM	BCl3 valve closed
3/19/2010	7:54:08 AM	PH3 valve closed
3/19/2010	7:54:08 AM	SiCl4 pre valve closed
3/19/2010	7:54:08 AM	SiCl4 post valve closed
3/19/2010	7:54:08 AM	Main Vac valve closed
3/19/2010	7:54:08 AM	Bubbler valve closed
3/19/2010	7:54:08 AM	Bypass valve opened
3/19/2010	7:54:08 AM	Helium MFC set to  0.000000
3/19/2010	7:54:08 AM	H2 MFC set to  0.000000
3/19/2010	7:54:08 AM	BCl3 MFC set to  0.000000
3/19/2010	7:54:08 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:54:08 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:54:08 AM	Tube furnace set to 0
3/19/2010	7:54:30 AM	Helium valve closed
3/19/2010	7:54:30 AM	H2 valve closed
3/19/2010	7:54:30 AM	BCl3 valve closed
3/19/2010	7:54:30 AM	PH3 valve closed
3/19/2010	7:54:30 AM	SiCl4 pre valve closed
3/19/2010	7:54:30 AM	SiCl4 post valve closed
3/19/2010	7:54:30 AM	Bubbler valve closed
3/19/2010	7:54:30 AM	Main Vac valve opened
3/19/2010	7:54:30 AM	Bypass valve opened
3/19/2010	7:54:30 AM	Helium MFC set to  0.000000
3/19/2010	7:54:30 AM	H2 MFC set to  0.000000
3/19/2010	7:54:30 AM	BCl3 MFC set to  0.000000
3/19/2010	7:54:30 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:54:30 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:54:30 AM	Tube furnace set to 0
3/19/2010	7:59:30 AM	H2 valve closed
3/19/2010	7:59:30 AM	BCl3 valve closed
3/19/2010	7:59:30 AM	PH3 valve closed
3/19/2010	7:59:30 AM	SiCl4 pre valve closed
3/19/2010	7:59:30 AM	SiCl4 post valve closed
3/19/2010	7:59:30 AM	Main Vac valve closed
3/19/2010	7:59:30 AM	Bypass valve closed
3/19/2010	7:59:30 AM	Bubbler valve closed
3/19/2010	7:59:30 AM	Helium valve opened
3/19/2010	7:59:30 AM	Helium MFC set to  500.000000
3/19/2010	7:59:30 AM	H2 MFC set to  0.000000
3/19/2010	7:59:30 AM	BCl3 MFC set to  0.000000
3/19/2010	7:59:30 AM	SiCl4 MFC set to  0.000000
3/19/2010	7:59:30 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	7:59:30 AM	Tube furnace set to 0
3/19/2010	8:00:53 AM	Helium valve closed
3/19/2010	8:00:53 AM	H2 valve closed
3/19/2010	8:00:53 AM	BCl3 valve closed
3/19/2010	8:00:53 AM	PH3 valve closed
3/19/2010	8:00:53 AM	SiCl4 pre valve closed
3/19/2010	8:00:53 AM	SiCl4 post valve closed
3/19/2010	8:00:53 AM	Main Vac valve closed
3/19/2010	8:00:53 AM	Bypass valve closed
3/19/2010	8:00:53 AM	Bubbler valve closed
3/19/2010	8:00:53 AM	Helium MFC set to  0.000000
3/19/2010	8:00:53 AM	H2 MFC set to  0.000000
3/19/2010	8:00:53 AM	BCl3 MFC set to  0.000000
3/19/2010	8:00:53 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:00:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:00:53 AM	Tube furnace set to 0
3/19/2010	8:01:08 AM	Helium valve closed
3/19/2010	8:01:08 AM	H2 valve closed
3/19/2010	8:01:08 AM	BCl3 valve closed
3/19/2010	8:01:08 AM	PH3 valve closed
3/19/2010	8:01:08 AM	SiCl4 pre valve closed
3/19/2010	8:01:08 AM	SiCl4 post valve closed
3/19/2010	8:01:08 AM	Main Vac valve closed
3/19/2010	8:01:08 AM	Bubbler valve closed
3/19/2010	8:01:08 AM	Bypass valve opened
3/19/2010	8:01:08 AM	Helium MFC set to  0.000000
3/19/2010	8:01:08 AM	H2 MFC set to  0.000000
3/19/2010	8:01:08 AM	BCl3 MFC set to  0.000000
3/19/2010	8:01:08 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:01:08 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:01:08 AM	Tube furnace set to 0
3/19/2010	8:01:31 AM	Helium valve closed
3/19/2010	8:01:31 AM	H2 valve closed
3/19/2010	8:01:31 AM	BCl3 valve closed
3/19/2010	8:01:31 AM	PH3 valve closed
3/19/2010	8:01:31 AM	SiCl4 pre valve closed
3/19/2010	8:01:31 AM	SiCl4 post valve closed
3/19/2010	8:01:31 AM	Bubbler valve closed
3/19/2010	8:01:31 AM	Main Vac valve opened
3/19/2010	8:01:31 AM	Bypass valve opened
3/19/2010	8:01:31 AM	Helium MFC set to  0.000000
3/19/2010	8:01:31 AM	H2 MFC set to  0.000000
3/19/2010	8:01:31 AM	BCl3 MFC set to  0.000000
3/19/2010	8:01:31 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:01:31 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:01:31 AM	Tube furnace set to 0
3/19/2010	8:06:31 AM	H2 valve closed
3/19/2010	8:06:31 AM	BCl3 valve closed
3/19/2010	8:06:31 AM	PH3 valve closed
3/19/2010	8:06:31 AM	SiCl4 pre valve closed
3/19/2010	8:06:31 AM	SiCl4 post valve closed
3/19/2010	8:06:31 AM	Main Vac valve closed
3/19/2010	8:06:31 AM	Bypass valve closed
3/19/2010	8:06:31 AM	Bubbler valve closed
3/19/2010	8:06:31 AM	Helium valve opened
3/19/2010	8:06:31 AM	Helium MFC set to  500.000000
3/19/2010	8:06:31 AM	H2 MFC set to  0.000000
3/19/2010	8:06:31 AM	BCl3 MFC set to  0.000000
3/19/2010	8:06:31 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:06:31 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:06:31 AM	Tube furnace set to 0
3/19/2010	8:07:54 AM	Helium valve closed
3/19/2010	8:07:54 AM	H2 valve closed
3/19/2010	8:07:54 AM	BCl3 valve closed
3/19/2010	8:07:54 AM	PH3 valve closed
3/19/2010	8:07:54 AM	SiCl4 pre valve closed
3/19/2010	8:07:54 AM	SiCl4 post valve closed
3/19/2010	8:07:54 AM	Main Vac valve closed
3/19/2010	8:07:54 AM	Bypass valve closed
3/19/2010	8:07:54 AM	Bubbler valve closed
3/19/2010	8:07:54 AM	Helium MFC set to  0.000000
3/19/2010	8:07:54 AM	H2 MFC set to  0.000000
3/19/2010	8:07:54 AM	BCl3 MFC set to  0.000000
3/19/2010	8:07:54 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:07:54 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:07:54 AM	Tube furnace set to 0
3/19/2010	8:08:09 AM	Helium valve closed
3/19/2010	8:08:09 AM	H2 valve closed
3/19/2010	8:08:09 AM	BCl3 valve closed
3/19/2010	8:08:09 AM	PH3 valve closed
3/19/2010	8:08:09 AM	SiCl4 pre valve closed
3/19/2010	8:08:09 AM	SiCl4 post valve closed
3/19/2010	8:08:09 AM	Main Vac valve closed
3/19/2010	8:08:09 AM	Bubbler valve closed
3/19/2010	8:08:09 AM	Bypass valve opened
3/19/2010	8:08:09 AM	Helium MFC set to  0.000000
3/19/2010	8:08:09 AM	H2 MFC set to  0.000000
3/19/2010	8:08:09 AM	BCl3 MFC set to  0.000000
3/19/2010	8:08:09 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:08:09 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:08:09 AM	Tube furnace set to 0
3/19/2010	8:08:32 AM	Helium valve closed
3/19/2010	8:08:32 AM	H2 valve closed
3/19/2010	8:08:32 AM	BCl3 valve closed
3/19/2010	8:08:32 AM	PH3 valve closed
3/19/2010	8:08:32 AM	SiCl4 pre valve closed
3/19/2010	8:08:32 AM	SiCl4 post valve closed
3/19/2010	8:08:32 AM	Bubbler valve closed
3/19/2010	8:08:32 AM	Main Vac valve opened
3/19/2010	8:08:32 AM	Bypass valve opened
3/19/2010	8:08:32 AM	Helium MFC set to  0.000000
3/19/2010	8:08:32 AM	H2 MFC set to  0.000000
3/19/2010	8:08:32 AM	BCl3 MFC set to  0.000000
3/19/2010	8:08:32 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:08:32 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:08:32 AM	Tube furnace set to 0
3/19/2010	8:13:32 AM	Helium valve closed
3/19/2010	8:13:32 AM	H2 valve closed
3/19/2010	8:13:32 AM	BCl3 valve closed
3/19/2010	8:13:32 AM	PH3 valve closed
3/19/2010	8:13:32 AM	SiCl4 pre valve closed
3/19/2010	8:13:32 AM	SiCl4 post valve closed
3/19/2010	8:13:32 AM	Bubbler valve closed
3/19/2010	8:13:32 AM	Main Vac valve opened
3/19/2010	8:13:32 AM	Bypass valve opened
3/19/2010	8:13:32 AM	Helium MFC set to  0.000000
3/19/2010	8:13:32 AM	H2 MFC set to  0.000000
3/19/2010	8:13:32 AM	BCl3 MFC set to  0.000000
3/19/2010	8:13:32 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:13:32 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:13:32 AM	Tube furnace set to 0
3/19/2010	8:13:33 AM	Run finished at 8:13 AM
3/19/2010	8:13:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	8:14:23 AM	Main Vac valve closed
3/19/2010	8:14:25 AM	Bypass valve closed
3/19/2010	8:14:40 AM	Bypass valve opened
3/19/2010	8:14:41 AM	Main Vac valve opened
3/19/2010	8:16:32 AM	Recipe started at 8:16 AM
3/19/2010	8:16:32 AM	Helium valve closed
3/19/2010	8:16:32 AM	BCl3 valve closed
3/19/2010	8:16:32 AM	PH3 valve closed
3/19/2010	8:16:32 AM	SiCl4 pre valve closed
3/19/2010	8:16:32 AM	SiCl4 post valve closed
3/19/2010	8:16:32 AM	Main Vac valve closed
3/19/2010	8:16:32 AM	Bypass valve closed
3/19/2010	8:16:32 AM	Bubbler valve closed
3/19/2010	8:16:32 AM	H2 valve opened
3/19/2010	8:16:32 AM	Helium MFC set to  0.000000
3/19/2010	8:16:32 AM	H2 MFC set to  500.000000
3/19/2010	8:16:32 AM	BCl3 MFC set to  0.000000
3/19/2010	8:16:32 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:16:32 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:16:32 AM	Tube furnace set to 0
3/19/2010	8:17:52 AM	Helium valve closed
3/19/2010	8:17:52 AM	BCl3 valve closed
3/19/2010	8:17:52 AM	PH3 valve closed
3/19/2010	8:17:52 AM	SiCl4 pre valve closed
3/19/2010	8:17:52 AM	SiCl4 post valve closed
3/19/2010	8:17:52 AM	Main Vac valve closed
3/19/2010	8:17:52 AM	Bypass valve closed
3/19/2010	8:17:52 AM	H2 valve opened
3/19/2010	8:17:52 AM	Bubbler valve opened
3/19/2010	8:17:52 AM	Helium MFC set to  0.000000
3/19/2010	8:17:52 AM	H2 MFC set to  500.000000
3/19/2010	8:17:52 AM	BCl3 MFC set to  0.000000
3/19/2010	8:17:52 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:17:52 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:17:52 AM	Tube furnace set to 0
3/19/2010	8:37:53 AM	Helium valve closed
3/19/2010	8:37:53 AM	BCl3 valve closed
3/19/2010	8:37:53 AM	PH3 valve closed
3/19/2010	8:37:53 AM	Main Vac valve closed
3/19/2010	8:37:53 AM	Bypass valve closed
3/19/2010	8:37:53 AM	H2 valve opened
3/19/2010	8:37:53 AM	SiCl4 pre valve opened
3/19/2010	8:37:53 AM	SiCl4 post valve opened
3/19/2010	8:37:53 AM	Bubbler valve opened
3/19/2010	8:37:53 AM	Helium MFC set to  0.000000
3/19/2010	8:37:53 AM	H2 MFC set to  500.000000
3/19/2010	8:37:53 AM	BCl3 MFC set to  0.000000
3/19/2010	8:37:53 AM	SiCl4 MFC set to  325.000000
3/19/2010	8:37:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:37:53 AM	Tube furnace set to 0
3/19/2010	8:52:53 AM	Helium valve closed
3/19/2010	8:52:53 AM	BCl3 valve closed
3/19/2010	8:52:53 AM	PH3 valve closed
3/19/2010	8:52:53 AM	SiCl4 pre valve closed
3/19/2010	8:52:53 AM	SiCl4 post valve closed
3/19/2010	8:52:53 AM	Main Vac valve closed
3/19/2010	8:52:53 AM	Bypass valve closed
3/19/2010	8:52:53 AM	H2 valve opened
3/19/2010	8:52:53 AM	Bubbler valve opened
3/19/2010	8:52:53 AM	Helium MFC set to  0.000000
3/19/2010	8:52:53 AM	H2 MFC set to  500.000000
3/19/2010	8:52:53 AM	BCl3 MFC set to  0.000000
3/19/2010	8:52:53 AM	SiCl4 MFC set to  0.000000
3/19/2010	8:52:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	8:52:53 AM	Tube furnace set to 0
3/19/2010	9:12:53 AM	H2 valve closed
3/19/2010	9:12:53 AM	BCl3 valve closed
3/19/2010	9:12:53 AM	PH3 valve closed
3/19/2010	9:12:53 AM	SiCl4 pre valve closed
3/19/2010	9:12:53 AM	SiCl4 post valve closed
3/19/2010	9:12:53 AM	Main Vac valve closed
3/19/2010	9:12:53 AM	Bypass valve closed
3/19/2010	9:12:53 AM	Helium valve opened
3/19/2010	9:12:53 AM	Bubbler valve opened
3/19/2010	9:12:53 AM	Helium MFC set to  500.000000
3/19/2010	9:12:53 AM	H2 MFC set to  0.000000
3/19/2010	9:12:53 AM	BCl3 MFC set to  0.000000
3/19/2010	9:12:53 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:12:53 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:12:53 AM	Tube furnace set to 0
3/19/2010	9:28:15 AM	Run aborted at 9:28 AM
3/19/2010	9:28:15 AM	Helium valve closed
3/19/2010	9:28:15 AM	H2 valve closed
3/19/2010	9:28:15 AM	BCl3 valve closed
3/19/2010	9:28:15 AM	PH3 valve closed
3/19/2010	9:28:15 AM	SiCl4 pre valve closed
3/19/2010	9:28:15 AM	SiCl4 post valve closed
3/19/2010	9:28:15 AM	Bypass valve closed
3/19/2010	9:28:15 AM	Main Vac valve closed
3/19/2010	9:28:15 AM	Bubbler valve closed
3/19/2010	9:28:15 AM	Helium MFC set to  0.000000
3/19/2010	9:28:15 AM	H2 MFC set to  0.000000
3/19/2010	9:28:15 AM	BCl3 MFC set to  0.000000
3/19/2010	9:28:15 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:28:15 AM	Tube furnace set to 0
3/19/2010	9:37:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	9:37:48 AM	Recipe started at 9:37 AM
3/19/2010	9:37:48 AM	Helium valve closed
3/19/2010	9:37:48 AM	H2 valve closed
3/19/2010	9:37:48 AM	BCl3 valve closed
3/19/2010	9:37:48 AM	PH3 valve closed
3/19/2010	9:37:48 AM	SiCl4 pre valve closed
3/19/2010	9:37:48 AM	SiCl4 post valve closed
3/19/2010	9:37:48 AM	Main Vac valve closed
3/19/2010	9:37:48 AM	Bubbler valve closed
3/19/2010	9:37:48 AM	Bypass valve opened
3/19/2010	9:37:48 AM	Helium MFC set to  0.000000
3/19/2010	9:37:48 AM	H2 MFC set to  0.000000
3/19/2010	9:37:48 AM	BCl3 MFC set to  0.000000
3/19/2010	9:37:48 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:37:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:37:48 AM	Tube furnace set to 0
3/19/2010	9:39:20 AM	Helium valve closed
3/19/2010	9:39:20 AM	H2 valve closed
3/19/2010	9:39:20 AM	BCl3 valve closed
3/19/2010	9:39:20 AM	PH3 valve closed
3/19/2010	9:39:20 AM	SiCl4 pre valve closed
3/19/2010	9:39:20 AM	SiCl4 post valve closed
3/19/2010	9:39:20 AM	Bubbler valve closed
3/19/2010	9:39:20 AM	Main Vac valve opened
3/19/2010	9:39:20 AM	Bypass valve opened
3/19/2010	9:39:20 AM	Helium MFC set to  0.000000
3/19/2010	9:39:20 AM	H2 MFC set to  0.000000
3/19/2010	9:39:20 AM	BCl3 MFC set to  0.000000
3/19/2010	9:39:20 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:39:20 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:39:20 AM	Tube furnace set to 0
3/19/2010	9:39:20 AM	Run finished at 9:39 AM
3/19/2010	9:39:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	9:40:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	9:40:21 AM	Recipe started at 9:40 AM
3/19/2010	9:40:21 AM	H2 valve closed
3/19/2010	9:40:21 AM	BCl3 valve closed
3/19/2010	9:40:21 AM	PH3 valve closed
3/19/2010	9:40:21 AM	SiCl4 pre valve closed
3/19/2010	9:40:21 AM	SiCl4 post valve closed
3/19/2010	9:40:21 AM	Main Vac valve closed
3/19/2010	9:40:21 AM	Bypass valve closed
3/19/2010	9:40:21 AM	Bubbler valve closed
3/19/2010	9:40:21 AM	Helium valve opened
3/19/2010	9:40:21 AM	Helium MFC set to  500.000000
3/19/2010	9:40:21 AM	H2 MFC set to  0.000000
3/19/2010	9:40:21 AM	BCl3 MFC set to  0.000000
3/19/2010	9:40:21 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:40:21 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:40:21 AM	Tube furnace set to 0
3/19/2010	9:41:42 AM	Helium valve closed
3/19/2010	9:41:42 AM	H2 valve closed
3/19/2010	9:41:42 AM	BCl3 valve closed
3/19/2010	9:41:42 AM	PH3 valve closed
3/19/2010	9:41:42 AM	SiCl4 pre valve closed
3/19/2010	9:41:42 AM	SiCl4 post valve closed
3/19/2010	9:41:42 AM	Main Vac valve closed
3/19/2010	9:41:42 AM	Bypass valve closed
3/19/2010	9:41:42 AM	Bubbler valve closed
3/19/2010	9:41:42 AM	Helium MFC set to  0.000000
3/19/2010	9:41:42 AM	H2 MFC set to  0.000000
3/19/2010	9:41:42 AM	BCl3 MFC set to  0.000000
3/19/2010	9:41:42 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:41:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:41:42 AM	Tube furnace set to 0
3/19/2010	9:41:57 AM	Helium valve closed
3/19/2010	9:41:57 AM	H2 valve closed
3/19/2010	9:41:57 AM	BCl3 valve closed
3/19/2010	9:41:57 AM	PH3 valve closed
3/19/2010	9:41:57 AM	SiCl4 pre valve closed
3/19/2010	9:41:57 AM	SiCl4 post valve closed
3/19/2010	9:41:57 AM	Main Vac valve closed
3/19/2010	9:41:57 AM	Bubbler valve closed
3/19/2010	9:41:57 AM	Bypass valve opened
3/19/2010	9:41:57 AM	Helium MFC set to  0.000000
3/19/2010	9:41:57 AM	H2 MFC set to  0.000000
3/19/2010	9:41:57 AM	BCl3 MFC set to  0.000000
3/19/2010	9:41:57 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:41:57 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:41:57 AM	Tube furnace set to 0
3/19/2010	9:42:19 AM	Helium valve closed
3/19/2010	9:42:19 AM	H2 valve closed
3/19/2010	9:42:19 AM	BCl3 valve closed
3/19/2010	9:42:19 AM	PH3 valve closed
3/19/2010	9:42:19 AM	SiCl4 pre valve closed
3/19/2010	9:42:19 AM	SiCl4 post valve closed
3/19/2010	9:42:19 AM	Bubbler valve closed
3/19/2010	9:42:19 AM	Main Vac valve opened
3/19/2010	9:42:19 AM	Bypass valve opened
3/19/2010	9:42:19 AM	Helium MFC set to  0.000000
3/19/2010	9:42:19 AM	H2 MFC set to  0.000000
3/19/2010	9:42:19 AM	BCl3 MFC set to  0.000000
3/19/2010	9:42:19 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:42:19 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:42:19 AM	Tube furnace set to 0
3/19/2010	9:47:19 AM	H2 valve closed
3/19/2010	9:47:19 AM	BCl3 valve closed
3/19/2010	9:47:19 AM	PH3 valve closed
3/19/2010	9:47:19 AM	SiCl4 pre valve closed
3/19/2010	9:47:19 AM	SiCl4 post valve closed
3/19/2010	9:47:19 AM	Main Vac valve closed
3/19/2010	9:47:19 AM	Bypass valve closed
3/19/2010	9:47:19 AM	Bubbler valve closed
3/19/2010	9:47:19 AM	Helium valve opened
3/19/2010	9:47:19 AM	Helium MFC set to  500.000000
3/19/2010	9:47:19 AM	H2 MFC set to  0.000000
3/19/2010	9:47:19 AM	BCl3 MFC set to  0.000000
3/19/2010	9:47:19 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:47:19 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:47:19 AM	Tube furnace set to 0
3/19/2010	9:48:41 AM	Helium valve closed
3/19/2010	9:48:41 AM	H2 valve closed
3/19/2010	9:48:41 AM	BCl3 valve closed
3/19/2010	9:48:41 AM	PH3 valve closed
3/19/2010	9:48:41 AM	SiCl4 pre valve closed
3/19/2010	9:48:41 AM	SiCl4 post valve closed
3/19/2010	9:48:41 AM	Main Vac valve closed
3/19/2010	9:48:41 AM	Bypass valve closed
3/19/2010	9:48:41 AM	Bubbler valve closed
3/19/2010	9:48:41 AM	Helium MFC set to  0.000000
3/19/2010	9:48:41 AM	H2 MFC set to  0.000000
3/19/2010	9:48:41 AM	BCl3 MFC set to  0.000000
3/19/2010	9:48:41 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:48:41 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:48:41 AM	Tube furnace set to 0
3/19/2010	9:48:56 AM	Helium valve closed
3/19/2010	9:48:56 AM	H2 valve closed
3/19/2010	9:48:56 AM	BCl3 valve closed
3/19/2010	9:48:56 AM	PH3 valve closed
3/19/2010	9:48:56 AM	SiCl4 pre valve closed
3/19/2010	9:48:56 AM	SiCl4 post valve closed
3/19/2010	9:48:56 AM	Main Vac valve closed
3/19/2010	9:48:56 AM	Bubbler valve closed
3/19/2010	9:48:56 AM	Bypass valve opened
3/19/2010	9:48:56 AM	Helium MFC set to  0.000000
3/19/2010	9:48:56 AM	H2 MFC set to  0.000000
3/19/2010	9:48:56 AM	BCl3 MFC set to  0.000000
3/19/2010	9:48:56 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:48:56 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:48:56 AM	Tube furnace set to 0
3/19/2010	9:49:18 AM	Helium valve closed
3/19/2010	9:49:18 AM	H2 valve closed
3/19/2010	9:49:18 AM	BCl3 valve closed
3/19/2010	9:49:18 AM	PH3 valve closed
3/19/2010	9:49:18 AM	SiCl4 pre valve closed
3/19/2010	9:49:18 AM	SiCl4 post valve closed
3/19/2010	9:49:18 AM	Bubbler valve closed
3/19/2010	9:49:18 AM	Main Vac valve opened
3/19/2010	9:49:18 AM	Bypass valve opened
3/19/2010	9:49:18 AM	Helium MFC set to  0.000000
3/19/2010	9:49:18 AM	H2 MFC set to  0.000000
3/19/2010	9:49:18 AM	BCl3 MFC set to  0.000000
3/19/2010	9:49:18 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:49:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:49:18 AM	Tube furnace set to 0
3/19/2010	9:54:18 AM	H2 valve closed
3/19/2010	9:54:18 AM	BCl3 valve closed
3/19/2010	9:54:18 AM	PH3 valve closed
3/19/2010	9:54:18 AM	SiCl4 pre valve closed
3/19/2010	9:54:18 AM	SiCl4 post valve closed
3/19/2010	9:54:18 AM	Main Vac valve closed
3/19/2010	9:54:18 AM	Bypass valve closed
3/19/2010	9:54:18 AM	Bubbler valve closed
3/19/2010	9:54:18 AM	Helium valve opened
3/19/2010	9:54:18 AM	Helium MFC set to  500.000000
3/19/2010	9:54:18 AM	H2 MFC set to  0.000000
3/19/2010	9:54:18 AM	BCl3 MFC set to  0.000000
3/19/2010	9:54:18 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:54:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:54:18 AM	Tube furnace set to 0
3/19/2010	9:55:40 AM	Helium valve closed
3/19/2010	9:55:40 AM	H2 valve closed
3/19/2010	9:55:40 AM	BCl3 valve closed
3/19/2010	9:55:40 AM	PH3 valve closed
3/19/2010	9:55:40 AM	SiCl4 pre valve closed
3/19/2010	9:55:40 AM	SiCl4 post valve closed
3/19/2010	9:55:40 AM	Main Vac valve closed
3/19/2010	9:55:40 AM	Bypass valve closed
3/19/2010	9:55:40 AM	Bubbler valve closed
3/19/2010	9:55:40 AM	Helium MFC set to  0.000000
3/19/2010	9:55:40 AM	H2 MFC set to  0.000000
3/19/2010	9:55:40 AM	BCl3 MFC set to  0.000000
3/19/2010	9:55:40 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:55:40 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:55:40 AM	Tube furnace set to 0
3/19/2010	9:55:55 AM	Helium valve closed
3/19/2010	9:55:55 AM	H2 valve closed
3/19/2010	9:55:55 AM	BCl3 valve closed
3/19/2010	9:55:55 AM	PH3 valve closed
3/19/2010	9:55:55 AM	SiCl4 pre valve closed
3/19/2010	9:55:55 AM	SiCl4 post valve closed
3/19/2010	9:55:55 AM	Main Vac valve closed
3/19/2010	9:55:55 AM	Bubbler valve closed
3/19/2010	9:55:55 AM	Bypass valve opened
3/19/2010	9:55:55 AM	Helium MFC set to  0.000000
3/19/2010	9:55:55 AM	H2 MFC set to  0.000000
3/19/2010	9:55:55 AM	BCl3 MFC set to  0.000000
3/19/2010	9:55:55 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:55:55 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:55:55 AM	Tube furnace set to 0
3/19/2010	9:56:17 AM	Helium valve closed
3/19/2010	9:56:18 AM	H2 valve closed
3/19/2010	9:56:18 AM	BCl3 valve closed
3/19/2010	9:56:18 AM	PH3 valve closed
3/19/2010	9:56:18 AM	SiCl4 pre valve closed
3/19/2010	9:56:18 AM	SiCl4 post valve closed
3/19/2010	9:56:18 AM	Bubbler valve closed
3/19/2010	9:56:18 AM	Main Vac valve opened
3/19/2010	9:56:18 AM	Bypass valve opened
3/19/2010	9:56:18 AM	Helium MFC set to  0.000000
3/19/2010	9:56:18 AM	H2 MFC set to  0.000000
3/19/2010	9:56:18 AM	BCl3 MFC set to  0.000000
3/19/2010	9:56:18 AM	SiCl4 MFC set to  0.000000
3/19/2010	9:56:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	9:56:18 AM	Tube furnace set to 0
3/19/2010	10:01:18 AM	Helium valve closed
3/19/2010	10:01:18 AM	H2 valve closed
3/19/2010	10:01:18 AM	BCl3 valve closed
3/19/2010	10:01:18 AM	PH3 valve closed
3/19/2010	10:01:18 AM	SiCl4 pre valve closed
3/19/2010	10:01:18 AM	SiCl4 post valve closed
3/19/2010	10:01:18 AM	Bubbler valve closed
3/19/2010	10:01:18 AM	Main Vac valve opened
3/19/2010	10:01:18 AM	Bypass valve opened
3/19/2010	10:01:18 AM	Helium MFC set to  0.000000
3/19/2010	10:01:18 AM	H2 MFC set to  0.000000
3/19/2010	10:01:18 AM	BCl3 MFC set to  0.000000
3/19/2010	10:01:18 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:01:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:01:18 AM	Tube furnace set to 0
3/19/2010	10:01:19 AM	Run finished at 10:01 AM
3/19/2010	10:01:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	10:07:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	10:07:47 AM	Recipe started at 10:07 AM
3/19/2010	10:07:47 AM	H2 valve closed
3/19/2010	10:07:47 AM	BCl3 valve closed
3/19/2010	10:07:47 AM	PH3 valve closed
3/19/2010	10:07:47 AM	SiCl4 pre valve closed
3/19/2010	10:07:47 AM	SiCl4 post valve closed
3/19/2010	10:07:47 AM	Main Vac valve closed
3/19/2010	10:07:47 AM	Bypass valve closed
3/19/2010	10:07:47 AM	Bubbler valve closed
3/19/2010	10:07:47 AM	Helium valve opened
3/19/2010	10:07:47 AM	Helium MFC set to  500.000000
3/19/2010	10:07:47 AM	H2 MFC set to  0.000000
3/19/2010	10:07:47 AM	BCl3 MFC set to  0.000000
3/19/2010	10:07:47 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:07:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:07:47 AM	Tube furnace set to 0
3/19/2010	10:09:09 AM	Helium valve closed
3/19/2010	10:09:09 AM	H2 valve closed
3/19/2010	10:09:09 AM	BCl3 valve closed
3/19/2010	10:09:09 AM	PH3 valve closed
3/19/2010	10:09:09 AM	SiCl4 pre valve closed
3/19/2010	10:09:09 AM	SiCl4 post valve closed
3/19/2010	10:09:09 AM	Main Vac valve closed
3/19/2010	10:09:09 AM	Bypass valve closed
3/19/2010	10:09:09 AM	Bubbler valve closed
3/19/2010	10:09:09 AM	Helium MFC set to  0.000000
3/19/2010	10:09:09 AM	H2 MFC set to  0.000000
3/19/2010	10:09:09 AM	BCl3 MFC set to  0.000000
3/19/2010	10:09:09 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:09:09 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:09:09 AM	Tube furnace set to 0
3/19/2010	10:09:25 AM	Helium valve closed
3/19/2010	10:09:25 AM	H2 valve closed
3/19/2010	10:09:25 AM	BCl3 valve closed
3/19/2010	10:09:25 AM	PH3 valve closed
3/19/2010	10:09:25 AM	SiCl4 pre valve closed
3/19/2010	10:09:25 AM	SiCl4 post valve closed
3/19/2010	10:09:25 AM	Main Vac valve closed
3/19/2010	10:09:25 AM	Bubbler valve closed
3/19/2010	10:09:25 AM	Bypass valve opened
3/19/2010	10:09:25 AM	Helium MFC set to  0.000000
3/19/2010	10:09:25 AM	H2 MFC set to  0.000000
3/19/2010	10:09:25 AM	BCl3 MFC set to  0.000000
3/19/2010	10:09:25 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:09:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:09:25 AM	Tube furnace set to 0
3/19/2010	10:09:47 AM	Helium valve closed
3/19/2010	10:09:47 AM	H2 valve closed
3/19/2010	10:09:47 AM	BCl3 valve closed
3/19/2010	10:09:47 AM	PH3 valve closed
3/19/2010	10:09:47 AM	SiCl4 pre valve closed
3/19/2010	10:09:47 AM	SiCl4 post valve closed
3/19/2010	10:09:47 AM	Bubbler valve closed
3/19/2010	10:09:47 AM	Main Vac valve opened
3/19/2010	10:09:47 AM	Bypass valve opened
3/19/2010	10:09:47 AM	Helium MFC set to  0.000000
3/19/2010	10:09:47 AM	H2 MFC set to  0.000000
3/19/2010	10:09:47 AM	BCl3 MFC set to  0.000000
3/19/2010	10:09:47 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:09:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:09:47 AM	Tube furnace set to 0
3/19/2010	10:14:47 AM	H2 valve closed
3/19/2010	10:14:47 AM	BCl3 valve closed
3/19/2010	10:14:47 AM	PH3 valve closed
3/19/2010	10:14:47 AM	SiCl4 pre valve closed
3/19/2010	10:14:47 AM	SiCl4 post valve closed
3/19/2010	10:14:47 AM	Main Vac valve closed
3/19/2010	10:14:47 AM	Bypass valve closed
3/19/2010	10:14:47 AM	Bubbler valve closed
3/19/2010	10:14:47 AM	Helium valve opened
3/19/2010	10:14:47 AM	Helium MFC set to  500.000000
3/19/2010	10:14:47 AM	H2 MFC set to  0.000000
3/19/2010	10:14:47 AM	BCl3 MFC set to  0.000000
3/19/2010	10:14:47 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:14:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:14:47 AM	Tube furnace set to 0
3/19/2010	10:16:10 AM	Helium valve closed
3/19/2010	10:16:10 AM	H2 valve closed
3/19/2010	10:16:10 AM	BCl3 valve closed
3/19/2010	10:16:10 AM	PH3 valve closed
3/19/2010	10:16:10 AM	SiCl4 pre valve closed
3/19/2010	10:16:10 AM	SiCl4 post valve closed
3/19/2010	10:16:10 AM	Main Vac valve closed
3/19/2010	10:16:10 AM	Bypass valve closed
3/19/2010	10:16:10 AM	Bubbler valve closed
3/19/2010	10:16:10 AM	Helium MFC set to  0.000000
3/19/2010	10:16:10 AM	H2 MFC set to  0.000000
3/19/2010	10:16:10 AM	BCl3 MFC set to  0.000000
3/19/2010	10:16:10 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:16:10 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:16:10 AM	Tube furnace set to 0
3/19/2010	10:16:25 AM	Helium valve closed
3/19/2010	10:16:25 AM	H2 valve closed
3/19/2010	10:16:25 AM	BCl3 valve closed
3/19/2010	10:16:25 AM	PH3 valve closed
3/19/2010	10:16:25 AM	SiCl4 pre valve closed
3/19/2010	10:16:25 AM	SiCl4 post valve closed
3/19/2010	10:16:25 AM	Main Vac valve closed
3/19/2010	10:16:25 AM	Bubbler valve closed
3/19/2010	10:16:25 AM	Bypass valve opened
3/19/2010	10:16:25 AM	Helium MFC set to  0.000000
3/19/2010	10:16:25 AM	H2 MFC set to  0.000000
3/19/2010	10:16:25 AM	BCl3 MFC set to  0.000000
3/19/2010	10:16:25 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:16:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:16:25 AM	Tube furnace set to 0
3/19/2010	10:16:47 AM	Helium valve closed
3/19/2010	10:16:47 AM	H2 valve closed
3/19/2010	10:16:47 AM	BCl3 valve closed
3/19/2010	10:16:47 AM	PH3 valve closed
3/19/2010	10:16:47 AM	SiCl4 pre valve closed
3/19/2010	10:16:47 AM	SiCl4 post valve closed
3/19/2010	10:16:47 AM	Bubbler valve closed
3/19/2010	10:16:47 AM	Main Vac valve opened
3/19/2010	10:16:47 AM	Bypass valve opened
3/19/2010	10:16:47 AM	Helium MFC set to  0.000000
3/19/2010	10:16:47 AM	H2 MFC set to  0.000000
3/19/2010	10:16:47 AM	BCl3 MFC set to  0.000000
3/19/2010	10:16:47 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:16:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:16:47 AM	Tube furnace set to 0
3/19/2010	10:21:48 AM	H2 valve closed
3/19/2010	10:21:48 AM	BCl3 valve closed
3/19/2010	10:21:48 AM	PH3 valve closed
3/19/2010	10:21:48 AM	SiCl4 pre valve closed
3/19/2010	10:21:48 AM	SiCl4 post valve closed
3/19/2010	10:21:48 AM	Main Vac valve closed
3/19/2010	10:21:48 AM	Bypass valve closed
3/19/2010	10:21:48 AM	Bubbler valve closed
3/19/2010	10:21:48 AM	Helium valve opened
3/19/2010	10:21:48 AM	Helium MFC set to  500.000000
3/19/2010	10:21:48 AM	H2 MFC set to  0.000000
3/19/2010	10:21:48 AM	BCl3 MFC set to  0.000000
3/19/2010	10:21:48 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:21:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:21:48 AM	Tube furnace set to 0
3/19/2010	10:23:10 AM	Helium valve closed
3/19/2010	10:23:10 AM	H2 valve closed
3/19/2010	10:23:10 AM	BCl3 valve closed
3/19/2010	10:23:10 AM	PH3 valve closed
3/19/2010	10:23:10 AM	SiCl4 pre valve closed
3/19/2010	10:23:10 AM	SiCl4 post valve closed
3/19/2010	10:23:10 AM	Main Vac valve closed
3/19/2010	10:23:10 AM	Bypass valve closed
3/19/2010	10:23:10 AM	Bubbler valve closed
3/19/2010	10:23:10 AM	Helium MFC set to  0.000000
3/19/2010	10:23:10 AM	H2 MFC set to  0.000000
3/19/2010	10:23:10 AM	BCl3 MFC set to  0.000000
3/19/2010	10:23:10 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:23:10 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:23:10 AM	Tube furnace set to 0
3/19/2010	10:23:26 AM	Helium valve closed
3/19/2010	10:23:26 AM	H2 valve closed
3/19/2010	10:23:26 AM	BCl3 valve closed
3/19/2010	10:23:26 AM	PH3 valve closed
3/19/2010	10:23:26 AM	SiCl4 pre valve closed
3/19/2010	10:23:26 AM	SiCl4 post valve closed
3/19/2010	10:23:26 AM	Main Vac valve closed
3/19/2010	10:23:26 AM	Bubbler valve closed
3/19/2010	10:23:26 AM	Bypass valve opened
3/19/2010	10:23:26 AM	Helium MFC set to  0.000000
3/19/2010	10:23:26 AM	H2 MFC set to  0.000000
3/19/2010	10:23:26 AM	BCl3 MFC set to  0.000000
3/19/2010	10:23:26 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:23:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:23:26 AM	Tube furnace set to 0
3/19/2010	10:23:48 AM	Helium valve closed
3/19/2010	10:23:48 AM	H2 valve closed
3/19/2010	10:23:48 AM	BCl3 valve closed
3/19/2010	10:23:48 AM	PH3 valve closed
3/19/2010	10:23:48 AM	SiCl4 pre valve closed
3/19/2010	10:23:48 AM	SiCl4 post valve closed
3/19/2010	10:23:48 AM	Bubbler valve closed
3/19/2010	10:23:48 AM	Main Vac valve opened
3/19/2010	10:23:48 AM	Bypass valve opened
3/19/2010	10:23:48 AM	Helium MFC set to  0.000000
3/19/2010	10:23:48 AM	H2 MFC set to  0.000000
3/19/2010	10:23:48 AM	BCl3 MFC set to  0.000000
3/19/2010	10:23:48 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:23:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:23:48 AM	Tube furnace set to 0
3/19/2010	10:28:48 AM	Helium valve closed
3/19/2010	10:28:48 AM	H2 valve closed
3/19/2010	10:28:48 AM	BCl3 valve closed
3/19/2010	10:28:48 AM	PH3 valve closed
3/19/2010	10:28:48 AM	SiCl4 pre valve closed
3/19/2010	10:28:48 AM	SiCl4 post valve closed
3/19/2010	10:28:48 AM	Bubbler valve closed
3/19/2010	10:28:48 AM	Main Vac valve opened
3/19/2010	10:28:48 AM	Bypass valve opened
3/19/2010	10:28:48 AM	Helium MFC set to  0.000000
3/19/2010	10:28:48 AM	H2 MFC set to  0.000000
3/19/2010	10:28:48 AM	BCl3 MFC set to  0.000000
3/19/2010	10:28:48 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:28:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:28:48 AM	Tube furnace set to 0
3/19/2010	10:28:50 AM	Run finished at 10:28 AM
3/19/2010	10:28:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	10:36:51 AM	Main Vac valve closed
3/19/2010	10:36:54 AM	Bypass valve closed
3/19/2010	10:37:02 AM	Main Vac valve opened
3/19/2010	10:37:03 AM	Bypass valve opened
3/19/2010	10:39:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	10:39:18 AM	Recipe started at 10:39 AM
3/19/2010	10:39:18 AM	H2 valve closed
3/19/2010	10:39:18 AM	BCl3 valve closed
3/19/2010	10:39:18 AM	PH3 valve closed
3/19/2010	10:39:18 AM	SiCl4 pre valve closed
3/19/2010	10:39:18 AM	SiCl4 post valve closed
3/19/2010	10:39:18 AM	Main Vac valve closed
3/19/2010	10:39:18 AM	Bypass valve closed
3/19/2010	10:39:18 AM	Bubbler valve closed
3/19/2010	10:39:18 AM	Helium valve opened
3/19/2010	10:39:18 AM	Helium MFC set to  500.000000
3/19/2010	10:39:18 AM	H2 MFC set to  0.000000
3/19/2010	10:39:18 AM	BCl3 MFC set to  0.000000
3/19/2010	10:39:18 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:39:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:39:18 AM	Tube furnace set to 0
3/19/2010	10:40:39 AM	Helium valve closed
3/19/2010	10:40:39 AM	H2 valve closed
3/19/2010	10:40:39 AM	BCl3 valve closed
3/19/2010	10:40:39 AM	PH3 valve closed
3/19/2010	10:40:39 AM	SiCl4 pre valve closed
3/19/2010	10:40:39 AM	SiCl4 post valve closed
3/19/2010	10:40:39 AM	Main Vac valve closed
3/19/2010	10:40:39 AM	Bypass valve closed
3/19/2010	10:40:39 AM	Bubbler valve closed
3/19/2010	10:40:39 AM	Helium MFC set to  0.000000
3/19/2010	10:40:39 AM	H2 MFC set to  0.000000
3/19/2010	10:40:39 AM	BCl3 MFC set to  0.000000
3/19/2010	10:40:39 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:40:39 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:40:39 AM	Tube furnace set to 0
3/19/2010	10:40:39 AM	Run finished at 10:40 AM
3/19/2010	10:40:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	10:40:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	10:40:41 AM	Recipe started at 10:40 AM
3/19/2010	10:40:41 AM	Helium valve closed
3/19/2010	10:40:41 AM	H2 valve closed
3/19/2010	10:40:41 AM	BCl3 valve closed
3/19/2010	10:40:41 AM	PH3 valve closed
3/19/2010	10:40:41 AM	SiCl4 pre valve closed
3/19/2010	10:40:41 AM	SiCl4 post valve closed
3/19/2010	10:40:41 AM	Main Vac valve closed
3/19/2010	10:40:41 AM	Bubbler valve closed
3/19/2010	10:40:41 AM	Bypass valve opened
3/19/2010	10:40:41 AM	Helium MFC set to  0.000000
3/19/2010	10:40:41 AM	H2 MFC set to  0.000000
3/19/2010	10:40:41 AM	BCl3 MFC set to  0.000000
3/19/2010	10:40:41 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:40:41 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:40:41 AM	Tube furnace set to 0
3/19/2010	10:41:03 AM	Helium valve closed
3/19/2010	10:41:03 AM	H2 valve closed
3/19/2010	10:41:03 AM	BCl3 valve closed
3/19/2010	10:41:03 AM	PH3 valve closed
3/19/2010	10:41:03 AM	SiCl4 pre valve closed
3/19/2010	10:41:03 AM	SiCl4 post valve closed
3/19/2010	10:41:03 AM	Bubbler valve closed
3/19/2010	10:41:03 AM	Main Vac valve opened
3/19/2010	10:41:03 AM	Bypass valve opened
3/19/2010	10:41:03 AM	Helium MFC set to  0.000000
3/19/2010	10:41:03 AM	H2 MFC set to  0.000000
3/19/2010	10:41:03 AM	BCl3 MFC set to  0.000000
3/19/2010	10:41:03 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:41:03 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:41:03 AM	Tube furnace set to 0
3/19/2010	10:41:03 AM	Run finished at 10:41 AM
3/19/2010	10:41:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	10:41:54 AM	Main Vac valve closed
3/19/2010	10:41:56 AM	Bypass valve closed
3/19/2010	10:42:12 AM	Bypass valve opened
3/19/2010	10:42:12 AM	Main Vac valve opened
3/19/2010	10:44:14 AM	Recipe started at 10:44 AM
3/19/2010	10:44:14 AM	Helium valve closed
3/19/2010	10:44:14 AM	BCl3 valve closed
3/19/2010	10:44:14 AM	PH3 valve closed
3/19/2010	10:44:14 AM	SiCl4 pre valve closed
3/19/2010	10:44:14 AM	SiCl4 post valve closed
3/19/2010	10:44:14 AM	Main Vac valve closed
3/19/2010	10:44:14 AM	Bypass valve closed
3/19/2010	10:44:14 AM	Bubbler valve closed
3/19/2010	10:44:14 AM	H2 valve opened
3/19/2010	10:44:14 AM	Helium MFC set to  0.000000
3/19/2010	10:44:14 AM	H2 MFC set to  500.000000
3/19/2010	10:44:14 AM	BCl3 MFC set to  0.000000
3/19/2010	10:44:14 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:44:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:44:14 AM	Tube furnace set to 0
3/19/2010	10:45:35 AM	Helium valve closed
3/19/2010	10:45:35 AM	BCl3 valve closed
3/19/2010	10:45:35 AM	PH3 valve closed
3/19/2010	10:45:35 AM	SiCl4 pre valve closed
3/19/2010	10:45:35 AM	SiCl4 post valve closed
3/19/2010	10:45:35 AM	Main Vac valve closed
3/19/2010	10:45:35 AM	Bypass valve closed
3/19/2010	10:45:35 AM	H2 valve opened
3/19/2010	10:45:35 AM	Bubbler valve opened
3/19/2010	10:45:35 AM	Helium MFC set to  0.000000
3/19/2010	10:45:35 AM	H2 MFC set to  500.000000
3/19/2010	10:45:35 AM	BCl3 MFC set to  0.000000
3/19/2010	10:45:35 AM	SiCl4 MFC set to  0.000000
3/19/2010	10:45:35 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	10:45:35 AM	Tube furnace set to 0
3/19/2010	11:05:35 AM	Helium valve closed
3/19/2010	11:05:35 AM	BCl3 valve closed
3/19/2010	11:05:35 AM	PH3 valve closed
3/19/2010	11:05:35 AM	Main Vac valve closed
3/19/2010	11:05:35 AM	Bypass valve closed
3/19/2010	11:05:35 AM	H2 valve opened
3/19/2010	11:05:35 AM	SiCl4 pre valve opened
3/19/2010	11:05:35 AM	SiCl4 post valve opened
3/19/2010	11:05:35 AM	Bubbler valve opened
3/19/2010	11:05:35 AM	Helium MFC set to  0.000000
3/19/2010	11:05:35 AM	H2 MFC set to  500.000000
3/19/2010	11:05:35 AM	BCl3 MFC set to  0.000000
3/19/2010	11:05:35 AM	SiCl4 MFC set to  325.000000
3/19/2010	11:05:35 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	11:05:35 AM	Tube furnace set to 0
3/19/2010	11:20:35 AM	Helium valve closed
3/19/2010	11:20:35 AM	BCl3 valve closed
3/19/2010	11:20:35 AM	PH3 valve closed
3/19/2010	11:20:35 AM	SiCl4 pre valve closed
3/19/2010	11:20:35 AM	SiCl4 post valve closed
3/19/2010	11:20:35 AM	Main Vac valve closed
3/19/2010	11:20:35 AM	Bypass valve closed
3/19/2010	11:20:35 AM	H2 valve opened
3/19/2010	11:20:35 AM	Bubbler valve opened
3/19/2010	11:20:35 AM	Helium MFC set to  0.000000
3/19/2010	11:20:35 AM	H2 MFC set to  500.000000
3/19/2010	11:20:35 AM	BCl3 MFC set to  0.000000
3/19/2010	11:20:35 AM	SiCl4 MFC set to  0.000000
3/19/2010	11:20:35 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	11:20:35 AM	Tube furnace set to 0
3/19/2010	11:40:36 AM	H2 valve closed
3/19/2010	11:40:36 AM	BCl3 valve closed
3/19/2010	11:40:36 AM	PH3 valve closed
3/19/2010	11:40:36 AM	SiCl4 pre valve closed
3/19/2010	11:40:36 AM	SiCl4 post valve closed
3/19/2010	11:40:36 AM	Main Vac valve closed
3/19/2010	11:40:36 AM	Bypass valve closed
3/19/2010	11:40:36 AM	Helium valve opened
3/19/2010	11:40:36 AM	Bubbler valve opened
3/19/2010	11:40:36 AM	Helium MFC set to  500.000000
3/19/2010	11:40:36 AM	H2 MFC set to  0.000000
3/19/2010	11:40:36 AM	BCl3 MFC set to  0.000000
3/19/2010	11:40:36 AM	SiCl4 MFC set to  0.000000
3/19/2010	11:40:36 AM	Bypass solenoid MFC set to  0.000000
3/19/2010	11:40:36 AM	Tube furnace set to 0
3/19/2010	12:00:36 PM	Helium valve closed
3/19/2010	12:00:36 PM	H2 valve closed
3/19/2010	12:00:36 PM	BCl3 valve closed
3/19/2010	12:00:36 PM	PH3 valve closed
3/19/2010	12:00:36 PM	SiCl4 pre valve closed
3/19/2010	12:00:36 PM	SiCl4 post valve closed
3/19/2010	12:00:36 PM	Main Vac valve closed
3/19/2010	12:00:36 PM	Bypass valve closed
3/19/2010	12:00:36 PM	Bubbler valve closed
3/19/2010	12:00:36 PM	Helium MFC set to  0.000000
3/19/2010	12:00:36 PM	H2 MFC set to  0.000000
3/19/2010	12:00:36 PM	BCl3 MFC set to  0.000000
3/19/2010	12:00:36 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:00:36 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:00:36 PM	Tube furnace set to 0
3/19/2010	12:00:36 PM	Run finished at 12:00 PM
3/19/2010	12:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	12:34:55 PM	Recipe started at 12:34 PM
3/19/2010	12:34:55 PM	Helium valve closed
3/19/2010	12:34:55 PM	H2 valve closed
3/19/2010	12:34:55 PM	BCl3 valve closed
3/19/2010	12:34:55 PM	PH3 valve closed
3/19/2010	12:34:55 PM	SiCl4 pre valve closed
3/19/2010	12:34:55 PM	SiCl4 post valve closed
3/19/2010	12:34:55 PM	Main Vac valve closed
3/19/2010	12:34:55 PM	Bubbler valve closed
3/19/2010	12:34:55 PM	Bypass valve opened
3/19/2010	12:34:55 PM	Helium MFC set to  0.000000
3/19/2010	12:34:55 PM	H2 MFC set to  0.000000
3/19/2010	12:34:55 PM	BCl3 MFC set to  0.000000
3/19/2010	12:34:55 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:34:55 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:34:55 PM	Tube furnace set to 0
3/19/2010	12:35:27 PM	Helium valve closed
3/19/2010	12:35:27 PM	H2 valve closed
3/19/2010	12:35:27 PM	BCl3 valve closed
3/19/2010	12:35:27 PM	PH3 valve closed
3/19/2010	12:35:27 PM	SiCl4 pre valve closed
3/19/2010	12:35:27 PM	SiCl4 post valve closed
3/19/2010	12:35:27 PM	Bubbler valve closed
3/19/2010	12:35:27 PM	Main Vac valve opened
3/19/2010	12:35:27 PM	Bypass valve opened
3/19/2010	12:35:27 PM	Helium MFC set to  0.000000
3/19/2010	12:35:27 PM	H2 MFC set to  0.000000
3/19/2010	12:35:27 PM	BCl3 MFC set to  0.000000
3/19/2010	12:35:27 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:35:27 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:35:27 PM	Tube furnace set to 0
3/19/2010	12:35:27 PM	Run finished at 12:35 PM
3/19/2010	12:35:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	12:36:50 PM	Main Vac valve closed
3/19/2010	12:36:53 PM	Bypass valve closed
3/19/2010	12:37:00 PM	Main Vac valve opened
3/19/2010	12:37:01 PM	Bypass valve opened
3/19/2010	12:37:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	12:37:50 PM	Recipe started at 12:37 PM
3/19/2010	12:37:50 PM	H2 valve closed
3/19/2010	12:37:50 PM	BCl3 valve closed
3/19/2010	12:37:50 PM	PH3 valve closed
3/19/2010	12:37:50 PM	SiCl4 pre valve closed
3/19/2010	12:37:50 PM	SiCl4 post valve closed
3/19/2010	12:37:50 PM	Main Vac valve closed
3/19/2010	12:37:50 PM	Bypass valve closed
3/19/2010	12:37:50 PM	Bubbler valve closed
3/19/2010	12:37:50 PM	Helium valve opened
3/19/2010	12:37:50 PM	Helium MFC set to  500.000000
3/19/2010	12:37:50 PM	H2 MFC set to  0.000000
3/19/2010	12:37:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:37:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:37:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:37:50 PM	Tube furnace set to 0
3/19/2010	12:39:12 PM	Helium valve closed
3/19/2010	12:39:12 PM	H2 valve closed
3/19/2010	12:39:12 PM	BCl3 valve closed
3/19/2010	12:39:12 PM	PH3 valve closed
3/19/2010	12:39:12 PM	SiCl4 pre valve closed
3/19/2010	12:39:12 PM	SiCl4 post valve closed
3/19/2010	12:39:12 PM	Main Vac valve closed
3/19/2010	12:39:12 PM	Bypass valve closed
3/19/2010	12:39:12 PM	Bubbler valve closed
3/19/2010	12:39:12 PM	Helium MFC set to  0.000000
3/19/2010	12:39:12 PM	H2 MFC set to  0.000000
3/19/2010	12:39:12 PM	BCl3 MFC set to  0.000000
3/19/2010	12:39:12 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:39:12 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:39:12 PM	Tube furnace set to 0
3/19/2010	12:39:28 PM	Helium valve closed
3/19/2010	12:39:28 PM	H2 valve closed
3/19/2010	12:39:28 PM	BCl3 valve closed
3/19/2010	12:39:28 PM	PH3 valve closed
3/19/2010	12:39:28 PM	SiCl4 pre valve closed
3/19/2010	12:39:28 PM	SiCl4 post valve closed
3/19/2010	12:39:28 PM	Main Vac valve closed
3/19/2010	12:39:28 PM	Bubbler valve closed
3/19/2010	12:39:28 PM	Bypass valve opened
3/19/2010	12:39:28 PM	Helium MFC set to  0.000000
3/19/2010	12:39:28 PM	H2 MFC set to  0.000000
3/19/2010	12:39:28 PM	BCl3 MFC set to  0.000000
3/19/2010	12:39:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:39:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:39:28 PM	Tube furnace set to 0
3/19/2010	12:39:50 PM	Helium valve closed
3/19/2010	12:39:50 PM	H2 valve closed
3/19/2010	12:39:50 PM	BCl3 valve closed
3/19/2010	12:39:50 PM	PH3 valve closed
3/19/2010	12:39:50 PM	SiCl4 pre valve closed
3/19/2010	12:39:50 PM	SiCl4 post valve closed
3/19/2010	12:39:50 PM	Bubbler valve closed
3/19/2010	12:39:50 PM	Main Vac valve opened
3/19/2010	12:39:50 PM	Bypass valve opened
3/19/2010	12:39:50 PM	Helium MFC set to  0.000000
3/19/2010	12:39:50 PM	H2 MFC set to  0.000000
3/19/2010	12:39:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:39:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:39:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:39:50 PM	Tube furnace set to 0
3/19/2010	12:44:50 PM	H2 valve closed
3/19/2010	12:44:50 PM	BCl3 valve closed
3/19/2010	12:44:50 PM	PH3 valve closed
3/19/2010	12:44:50 PM	SiCl4 pre valve closed
3/19/2010	12:44:50 PM	SiCl4 post valve closed
3/19/2010	12:44:50 PM	Main Vac valve closed
3/19/2010	12:44:50 PM	Bypass valve closed
3/19/2010	12:44:50 PM	Bubbler valve closed
3/19/2010	12:44:50 PM	Helium valve opened
3/19/2010	12:44:50 PM	Helium MFC set to  500.000000
3/19/2010	12:44:50 PM	H2 MFC set to  0.000000
3/19/2010	12:44:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:44:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:44:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:44:50 PM	Tube furnace set to 0
3/19/2010	12:46:12 PM	Helium valve closed
3/19/2010	12:46:12 PM	H2 valve closed
3/19/2010	12:46:12 PM	BCl3 valve closed
3/19/2010	12:46:12 PM	PH3 valve closed
3/19/2010	12:46:12 PM	SiCl4 pre valve closed
3/19/2010	12:46:12 PM	SiCl4 post valve closed
3/19/2010	12:46:12 PM	Main Vac valve closed
3/19/2010	12:46:12 PM	Bypass valve closed
3/19/2010	12:46:12 PM	Bubbler valve closed
3/19/2010	12:46:12 PM	Helium MFC set to  0.000000
3/19/2010	12:46:12 PM	H2 MFC set to  0.000000
3/19/2010	12:46:12 PM	BCl3 MFC set to  0.000000
3/19/2010	12:46:12 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:46:12 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:46:12 PM	Tube furnace set to 0
3/19/2010	12:46:28 PM	Helium valve closed
3/19/2010	12:46:28 PM	H2 valve closed
3/19/2010	12:46:28 PM	BCl3 valve closed
3/19/2010	12:46:28 PM	PH3 valve closed
3/19/2010	12:46:28 PM	SiCl4 pre valve closed
3/19/2010	12:46:28 PM	SiCl4 post valve closed
3/19/2010	12:46:28 PM	Main Vac valve closed
3/19/2010	12:46:28 PM	Bubbler valve closed
3/19/2010	12:46:28 PM	Bypass valve opened
3/19/2010	12:46:28 PM	Helium MFC set to  0.000000
3/19/2010	12:46:28 PM	H2 MFC set to  0.000000
3/19/2010	12:46:28 PM	BCl3 MFC set to  0.000000
3/19/2010	12:46:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:46:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:46:28 PM	Tube furnace set to 0
3/19/2010	12:46:50 PM	Helium valve closed
3/19/2010	12:46:50 PM	H2 valve closed
3/19/2010	12:46:50 PM	BCl3 valve closed
3/19/2010	12:46:50 PM	PH3 valve closed
3/19/2010	12:46:50 PM	SiCl4 pre valve closed
3/19/2010	12:46:50 PM	SiCl4 post valve closed
3/19/2010	12:46:50 PM	Bubbler valve closed
3/19/2010	12:46:50 PM	Main Vac valve opened
3/19/2010	12:46:50 PM	Bypass valve opened
3/19/2010	12:46:50 PM	Helium MFC set to  0.000000
3/19/2010	12:46:50 PM	H2 MFC set to  0.000000
3/19/2010	12:46:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:46:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:46:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:46:50 PM	Tube furnace set to 0
3/19/2010	12:51:50 PM	H2 valve closed
3/19/2010	12:51:50 PM	BCl3 valve closed
3/19/2010	12:51:50 PM	PH3 valve closed
3/19/2010	12:51:50 PM	SiCl4 pre valve closed
3/19/2010	12:51:50 PM	SiCl4 post valve closed
3/19/2010	12:51:50 PM	Main Vac valve closed
3/19/2010	12:51:50 PM	Bypass valve closed
3/19/2010	12:51:50 PM	Bubbler valve closed
3/19/2010	12:51:50 PM	Helium valve opened
3/19/2010	12:51:50 PM	Helium MFC set to  500.000000
3/19/2010	12:51:50 PM	H2 MFC set to  0.000000
3/19/2010	12:51:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:51:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:51:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:51:50 PM	Tube furnace set to 0
3/19/2010	12:53:13 PM	Helium valve closed
3/19/2010	12:53:13 PM	H2 valve closed
3/19/2010	12:53:13 PM	BCl3 valve closed
3/19/2010	12:53:13 PM	PH3 valve closed
3/19/2010	12:53:13 PM	SiCl4 pre valve closed
3/19/2010	12:53:13 PM	SiCl4 post valve closed
3/19/2010	12:53:13 PM	Main Vac valve closed
3/19/2010	12:53:13 PM	Bypass valve closed
3/19/2010	12:53:13 PM	Bubbler valve closed
3/19/2010	12:53:13 PM	Helium MFC set to  0.000000
3/19/2010	12:53:13 PM	H2 MFC set to  0.000000
3/19/2010	12:53:13 PM	BCl3 MFC set to  0.000000
3/19/2010	12:53:13 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:53:13 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:53:13 PM	Tube furnace set to 0
3/19/2010	12:53:28 PM	Helium valve closed
3/19/2010	12:53:28 PM	H2 valve closed
3/19/2010	12:53:28 PM	BCl3 valve closed
3/19/2010	12:53:28 PM	PH3 valve closed
3/19/2010	12:53:28 PM	SiCl4 pre valve closed
3/19/2010	12:53:28 PM	SiCl4 post valve closed
3/19/2010	12:53:28 PM	Main Vac valve closed
3/19/2010	12:53:28 PM	Bubbler valve closed
3/19/2010	12:53:28 PM	Bypass valve opened
3/19/2010	12:53:28 PM	Helium MFC set to  0.000000
3/19/2010	12:53:28 PM	H2 MFC set to  0.000000
3/19/2010	12:53:28 PM	BCl3 MFC set to  0.000000
3/19/2010	12:53:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:53:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:53:28 PM	Tube furnace set to 0
3/19/2010	12:53:50 PM	Helium valve closed
3/19/2010	12:53:50 PM	H2 valve closed
3/19/2010	12:53:50 PM	BCl3 valve closed
3/19/2010	12:53:50 PM	PH3 valve closed
3/19/2010	12:53:50 PM	SiCl4 pre valve closed
3/19/2010	12:53:50 PM	SiCl4 post valve closed
3/19/2010	12:53:50 PM	Bubbler valve closed
3/19/2010	12:53:50 PM	Main Vac valve opened
3/19/2010	12:53:50 PM	Bypass valve opened
3/19/2010	12:53:50 PM	Helium MFC set to  0.000000
3/19/2010	12:53:50 PM	H2 MFC set to  0.000000
3/19/2010	12:53:50 PM	BCl3 MFC set to  0.000000
3/19/2010	12:53:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:53:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:53:50 PM	Tube furnace set to 0
3/19/2010	12:54:37 PM	Helium valve closed
3/19/2010	12:54:37 PM	H2 valve closed
3/19/2010	12:54:37 PM	BCl3 valve closed
3/19/2010	12:54:37 PM	PH3 valve closed
3/19/2010	12:54:37 PM	SiCl4 pre valve closed
3/19/2010	12:54:37 PM	SiCl4 post valve closed
3/19/2010	12:54:37 PM	Bubbler valve closed
3/19/2010	12:54:37 PM	Main Vac valve opened
3/19/2010	12:54:37 PM	Bypass valve opened
3/19/2010	12:54:37 PM	Helium MFC set to  0.000000
3/19/2010	12:54:37 PM	H2 MFC set to  0.000000
3/19/2010	12:54:37 PM	BCl3 MFC set to  0.000000
3/19/2010	12:54:37 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:54:37 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:54:37 PM	Tube furnace set to 0
3/19/2010	12:54:38 PM	Run finished at 12:54 PM
3/19/2010	12:54:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	12:55:15 PM	Main Vac valve closed
3/19/2010	12:55:19 PM	Bypass valve closed
3/19/2010	12:55:33 PM	Bypass valve opened
3/19/2010	12:55:34 PM	Main Vac valve opened
3/19/2010	12:58:29 PM	Recipe started at 12:58 PM
3/19/2010	12:58:29 PM	Helium valve closed
3/19/2010	12:58:29 PM	BCl3 valve closed
3/19/2010	12:58:29 PM	PH3 valve closed
3/19/2010	12:58:29 PM	SiCl4 pre valve closed
3/19/2010	12:58:29 PM	SiCl4 post valve closed
3/19/2010	12:58:29 PM	Main Vac valve closed
3/19/2010	12:58:29 PM	Bypass valve closed
3/19/2010	12:58:29 PM	Bubbler valve closed
3/19/2010	12:58:29 PM	H2 valve opened
3/19/2010	12:58:29 PM	Helium MFC set to  0.000000
3/19/2010	12:58:29 PM	H2 MFC set to  500.000000
3/19/2010	12:58:29 PM	BCl3 MFC set to  0.000000
3/19/2010	12:58:29 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:58:29 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:58:29 PM	Tube furnace set to 0
3/19/2010	12:59:48 PM	Helium valve closed
3/19/2010	12:59:48 PM	BCl3 valve closed
3/19/2010	12:59:48 PM	PH3 valve closed
3/19/2010	12:59:48 PM	SiCl4 pre valve closed
3/19/2010	12:59:48 PM	SiCl4 post valve closed
3/19/2010	12:59:48 PM	Main Vac valve closed
3/19/2010	12:59:48 PM	Bypass valve closed
3/19/2010	12:59:48 PM	H2 valve opened
3/19/2010	12:59:48 PM	Bubbler valve opened
3/19/2010	12:59:48 PM	Helium MFC set to  0.000000
3/19/2010	12:59:48 PM	H2 MFC set to  500.000000
3/19/2010	12:59:48 PM	BCl3 MFC set to  0.000000
3/19/2010	12:59:48 PM	SiCl4 MFC set to  0.000000
3/19/2010	12:59:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	12:59:48 PM	Tube furnace set to 0
3/19/2010	1:19:48 PM	Helium valve closed
3/19/2010	1:19:48 PM	BCl3 valve closed
3/19/2010	1:19:48 PM	PH3 valve closed
3/19/2010	1:19:48 PM	Main Vac valve closed
3/19/2010	1:19:48 PM	Bypass valve closed
3/19/2010	1:19:48 PM	H2 valve opened
3/19/2010	1:19:48 PM	SiCl4 pre valve opened
3/19/2010	1:19:48 PM	SiCl4 post valve opened
3/19/2010	1:19:48 PM	Bubbler valve opened
3/19/2010	1:19:48 PM	Helium MFC set to  0.000000
3/19/2010	1:19:48 PM	H2 MFC set to  500.000000
3/19/2010	1:19:48 PM	BCl3 MFC set to  0.000000
3/19/2010	1:19:48 PM	SiCl4 MFC set to  300.000000
3/19/2010	1:19:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	1:19:48 PM	Tube furnace set to 0
3/19/2010	1:34:48 PM	Helium valve closed
3/19/2010	1:34:48 PM	BCl3 valve closed
3/19/2010	1:34:48 PM	PH3 valve closed
3/19/2010	1:34:48 PM	SiCl4 pre valve closed
3/19/2010	1:34:48 PM	SiCl4 post valve closed
3/19/2010	1:34:48 PM	Main Vac valve closed
3/19/2010	1:34:48 PM	Bypass valve closed
3/19/2010	1:34:48 PM	H2 valve opened
3/19/2010	1:34:48 PM	Bubbler valve opened
3/19/2010	1:34:48 PM	Helium MFC set to  0.000000
3/19/2010	1:34:48 PM	H2 MFC set to  500.000000
3/19/2010	1:34:48 PM	BCl3 MFC set to  0.000000
3/19/2010	1:34:48 PM	SiCl4 MFC set to  0.000000
3/19/2010	1:34:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	1:34:48 PM	Tube furnace set to 0
3/19/2010	1:54:49 PM	H2 valve closed
3/19/2010	1:54:49 PM	BCl3 valve closed
3/19/2010	1:54:49 PM	PH3 valve closed
3/19/2010	1:54:49 PM	SiCl4 pre valve closed
3/19/2010	1:54:49 PM	SiCl4 post valve closed
3/19/2010	1:54:49 PM	Main Vac valve closed
3/19/2010	1:54:49 PM	Bypass valve closed
3/19/2010	1:54:49 PM	Helium valve opened
3/19/2010	1:54:49 PM	Bubbler valve opened
3/19/2010	1:54:49 PM	Helium MFC set to  500.000000
3/19/2010	1:54:49 PM	H2 MFC set to  0.000000
3/19/2010	1:54:49 PM	BCl3 MFC set to  0.000000
3/19/2010	1:54:49 PM	SiCl4 MFC set to  0.000000
3/19/2010	1:54:49 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	1:54:49 PM	Tube furnace set to 0
3/19/2010	2:06:27 PM	Run aborted at 2:06 PM
3/19/2010	2:06:27 PM	Helium valve closed
3/19/2010	2:06:27 PM	H2 valve closed
3/19/2010	2:06:27 PM	BCl3 valve closed
3/19/2010	2:06:27 PM	PH3 valve closed
3/19/2010	2:06:27 PM	SiCl4 pre valve closed
3/19/2010	2:06:27 PM	SiCl4 post valve closed
3/19/2010	2:06:27 PM	Bypass valve closed
3/19/2010	2:06:27 PM	Main Vac valve closed
3/19/2010	2:06:27 PM	Bubbler valve closed
3/19/2010	2:06:27 PM	Helium MFC set to  0.000000
3/19/2010	2:06:27 PM	H2 MFC set to  0.000000
3/19/2010	2:06:27 PM	BCl3 MFC set to  0.000000
3/19/2010	2:06:27 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:06:27 PM	Tube furnace set to 0
3/19/2010	2:09:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	2:09:38 PM	Recipe started at 2:09 PM
3/19/2010	2:09:38 PM	Helium valve closed
3/19/2010	2:09:38 PM	H2 valve closed
3/19/2010	2:09:38 PM	BCl3 valve closed
3/19/2010	2:09:38 PM	PH3 valve closed
3/19/2010	2:09:38 PM	SiCl4 pre valve closed
3/19/2010	2:09:38 PM	SiCl4 post valve closed
3/19/2010	2:09:38 PM	Main Vac valve closed
3/19/2010	2:09:38 PM	Bubbler valve closed
3/19/2010	2:09:38 PM	Bypass valve opened
3/19/2010	2:09:38 PM	Helium MFC set to  0.000000
3/19/2010	2:09:38 PM	H2 MFC set to  0.000000
3/19/2010	2:09:38 PM	BCl3 MFC set to  0.000000
3/19/2010	2:09:38 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:09:38 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:09:38 PM	Tube furnace set to 0
3/19/2010	2:10:08 PM	Helium valve closed
3/19/2010	2:10:08 PM	H2 valve closed
3/19/2010	2:10:08 PM	BCl3 valve closed
3/19/2010	2:10:08 PM	PH3 valve closed
3/19/2010	2:10:08 PM	SiCl4 pre valve closed
3/19/2010	2:10:08 PM	SiCl4 post valve closed
3/19/2010	2:10:08 PM	Bubbler valve closed
3/19/2010	2:10:08 PM	Main Vac valve opened
3/19/2010	2:10:08 PM	Bypass valve opened
3/19/2010	2:10:08 PM	Helium MFC set to  0.000000
3/19/2010	2:10:08 PM	H2 MFC set to  0.000000
3/19/2010	2:10:08 PM	BCl3 MFC set to  0.000000
3/19/2010	2:10:08 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:10:08 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:10:08 PM	Tube furnace set to 0
3/19/2010	2:10:09 PM	Run finished at 2:10 PM
3/19/2010	2:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	2:22:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	2:22:50 PM	Recipe started at 2:22 PM
3/19/2010	2:22:50 PM	H2 valve closed
3/19/2010	2:22:50 PM	BCl3 valve closed
3/19/2010	2:22:50 PM	PH3 valve closed
3/19/2010	2:22:50 PM	SiCl4 pre valve closed
3/19/2010	2:22:50 PM	SiCl4 post valve closed
3/19/2010	2:22:50 PM	Main Vac valve closed
3/19/2010	2:22:50 PM	Bypass valve closed
3/19/2010	2:22:50 PM	Bubbler valve closed
3/19/2010	2:22:50 PM	Helium valve opened
3/19/2010	2:22:50 PM	Helium MFC set to  500.000000
3/19/2010	2:22:50 PM	H2 MFC set to  0.000000
3/19/2010	2:22:50 PM	BCl3 MFC set to  0.000000
3/19/2010	2:22:50 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:22:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:22:50 PM	Tube furnace set to 0
3/19/2010	2:23:02 PM	Helium valve closed
3/19/2010	2:23:02 PM	H2 valve closed
3/19/2010	2:23:02 PM	BCl3 valve closed
3/19/2010	2:23:02 PM	PH3 valve closed
3/19/2010	2:23:02 PM	SiCl4 pre valve closed
3/19/2010	2:23:02 PM	SiCl4 post valve closed
3/19/2010	2:23:02 PM	Main Vac valve closed
3/19/2010	2:23:02 PM	Bypass valve closed
3/19/2010	2:23:02 PM	Bubbler valve closed
3/19/2010	2:23:02 PM	Helium MFC set to  0.000000
3/19/2010	2:23:02 PM	H2 MFC set to  0.000000
3/19/2010	2:23:02 PM	BCl3 MFC set to  0.000000
3/19/2010	2:23:02 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:23:02 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:23:02 PM	Tube furnace set to 0
3/19/2010	2:23:02 PM	Run finished at 2:23 PM
3/19/2010	2:23:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	2:25:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	2:25:36 PM	Recipe started at 2:25 PM
3/19/2010	2:25:36 PM	H2 valve closed
3/19/2010	2:25:36 PM	BCl3 valve closed
3/19/2010	2:25:36 PM	PH3 valve closed
3/19/2010	2:25:36 PM	SiCl4 pre valve closed
3/19/2010	2:25:36 PM	SiCl4 post valve closed
3/19/2010	2:25:36 PM	Main Vac valve closed
3/19/2010	2:25:36 PM	Bypass valve closed
3/19/2010	2:25:36 PM	Bubbler valve closed
3/19/2010	2:25:36 PM	Helium valve opened
3/19/2010	2:25:36 PM	Helium MFC set to  500.000000
3/19/2010	2:25:36 PM	H2 MFC set to  0.000000
3/19/2010	2:25:36 PM	BCl3 MFC set to  0.000000
3/19/2010	2:25:36 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:25:36 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:25:36 PM	Tube furnace set to 0
3/19/2010	2:25:38 PM	Helium valve closed
3/19/2010	2:25:38 PM	H2 valve closed
3/19/2010	2:25:38 PM	BCl3 valve closed
3/19/2010	2:25:38 PM	PH3 valve closed
3/19/2010	2:25:38 PM	SiCl4 pre valve closed
3/19/2010	2:25:38 PM	SiCl4 post valve closed
3/19/2010	2:25:38 PM	Main Vac valve closed
3/19/2010	2:25:38 PM	Bypass valve closed
3/19/2010	2:25:38 PM	Bubbler valve closed
3/19/2010	2:25:38 PM	Helium MFC set to  0.000000
3/19/2010	2:25:38 PM	H2 MFC set to  0.000000
3/19/2010	2:25:38 PM	BCl3 MFC set to  0.000000
3/19/2010	2:25:38 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:25:38 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:25:38 PM	Tube furnace set to 0
3/19/2010	2:25:54 PM	Helium valve closed
3/19/2010	2:25:54 PM	H2 valve closed
3/19/2010	2:25:54 PM	BCl3 valve closed
3/19/2010	2:25:54 PM	PH3 valve closed
3/19/2010	2:25:54 PM	SiCl4 pre valve closed
3/19/2010	2:25:54 PM	SiCl4 post valve closed
3/19/2010	2:25:54 PM	Main Vac valve closed
3/19/2010	2:25:54 PM	Bubbler valve closed
3/19/2010	2:25:54 PM	Bypass valve opened
3/19/2010	2:25:54 PM	Helium MFC set to  0.000000
3/19/2010	2:25:54 PM	H2 MFC set to  0.000000
3/19/2010	2:25:54 PM	BCl3 MFC set to  0.000000
3/19/2010	2:25:54 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:25:54 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:25:54 PM	Tube furnace set to 0
3/19/2010	2:26:35 PM	Helium valve closed
3/19/2010	2:26:35 PM	H2 valve closed
3/19/2010	2:26:35 PM	BCl3 valve closed
3/19/2010	2:26:35 PM	PH3 valve closed
3/19/2010	2:26:35 PM	SiCl4 pre valve closed
3/19/2010	2:26:35 PM	SiCl4 post valve closed
3/19/2010	2:26:35 PM	Bubbler valve closed
3/19/2010	2:26:35 PM	Main Vac valve opened
3/19/2010	2:26:35 PM	Bypass valve opened
3/19/2010	2:26:35 PM	Helium MFC set to  0.000000
3/19/2010	2:26:35 PM	H2 MFC set to  0.000000
3/19/2010	2:26:35 PM	BCl3 MFC set to  0.000000
3/19/2010	2:26:35 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:26:35 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:26:35 PM	Tube furnace set to 0
3/19/2010	2:29:52 PM	Run aborted at 2:29 PM
3/19/2010	2:29:52 PM	Helium valve closed
3/19/2010	2:29:52 PM	H2 valve closed
3/19/2010	2:29:52 PM	BCl3 valve closed
3/19/2010	2:29:52 PM	PH3 valve closed
3/19/2010	2:29:52 PM	SiCl4 pre valve closed
3/19/2010	2:29:52 PM	SiCl4 post valve closed
3/19/2010	2:29:52 PM	Bypass valve closed
3/19/2010	2:29:52 PM	Main Vac valve closed
3/19/2010	2:29:52 PM	Bubbler valve closed
3/19/2010	2:29:52 PM	Helium MFC set to  0.000000
3/19/2010	2:29:52 PM	H2 MFC set to  0.000000
3/19/2010	2:29:52 PM	BCl3 MFC set to  0.000000
3/19/2010	2:29:52 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:29:52 PM	Tube furnace set to 0
3/19/2010	2:29:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	2:29:55 PM	Bypass valve closed
3/19/2010	2:29:55 PM	Bypass valve opened
3/19/2010	2:29:56 PM	Main Vac valve closed
3/19/2010	2:30:04 PM	Main Vac valve opened
3/19/2010	2:31:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	2:31:06 PM	Recipe started at 2:31 PM
3/19/2010	2:31:06 PM	H2 valve closed
3/19/2010	2:31:06 PM	BCl3 valve closed
3/19/2010	2:31:06 PM	PH3 valve closed
3/19/2010	2:31:06 PM	SiCl4 pre valve closed
3/19/2010	2:31:06 PM	SiCl4 post valve closed
3/19/2010	2:31:06 PM	Main Vac valve closed
3/19/2010	2:31:06 PM	Bypass valve closed
3/19/2010	2:31:06 PM	Bubbler valve closed
3/19/2010	2:31:06 PM	Helium valve opened
3/19/2010	2:31:06 PM	Helium MFC set to  500.000000
3/19/2010	2:31:06 PM	H2 MFC set to  0.000000
3/19/2010	2:31:06 PM	BCl3 MFC set to  0.000000
3/19/2010	2:31:06 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:31:06 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:31:06 PM	Tube furnace set to 0
3/19/2010	2:32:28 PM	Helium valve closed
3/19/2010	2:32:28 PM	H2 valve closed
3/19/2010	2:32:28 PM	BCl3 valve closed
3/19/2010	2:32:28 PM	PH3 valve closed
3/19/2010	2:32:28 PM	SiCl4 pre valve closed
3/19/2010	2:32:28 PM	SiCl4 post valve closed
3/19/2010	2:32:28 PM	Main Vac valve closed
3/19/2010	2:32:28 PM	Bypass valve closed
3/19/2010	2:32:28 PM	Bubbler valve closed
3/19/2010	2:32:28 PM	Helium MFC set to  0.000000
3/19/2010	2:32:28 PM	H2 MFC set to  0.000000
3/19/2010	2:32:28 PM	BCl3 MFC set to  0.000000
3/19/2010	2:32:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:32:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:32:28 PM	Tube furnace set to 0
3/19/2010	2:32:43 PM	Helium valve closed
3/19/2010	2:32:43 PM	H2 valve closed
3/19/2010	2:32:43 PM	BCl3 valve closed
3/19/2010	2:32:43 PM	PH3 valve closed
3/19/2010	2:32:43 PM	SiCl4 pre valve closed
3/19/2010	2:32:43 PM	SiCl4 post valve closed
3/19/2010	2:32:43 PM	Main Vac valve closed
3/19/2010	2:32:43 PM	Bubbler valve closed
3/19/2010	2:32:43 PM	Bypass valve opened
3/19/2010	2:32:43 PM	Helium MFC set to  0.000000
3/19/2010	2:32:43 PM	H2 MFC set to  0.000000
3/19/2010	2:32:43 PM	BCl3 MFC set to  0.000000
3/19/2010	2:32:43 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:32:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:32:43 PM	Tube furnace set to 0
3/19/2010	2:33:05 PM	Helium valve closed
3/19/2010	2:33:05 PM	H2 valve closed
3/19/2010	2:33:05 PM	BCl3 valve closed
3/19/2010	2:33:05 PM	PH3 valve closed
3/19/2010	2:33:05 PM	SiCl4 pre valve closed
3/19/2010	2:33:05 PM	SiCl4 post valve closed
3/19/2010	2:33:05 PM	Bubbler valve closed
3/19/2010	2:33:05 PM	Main Vac valve opened
3/19/2010	2:33:05 PM	Bypass valve opened
3/19/2010	2:33:05 PM	Helium MFC set to  0.000000
3/19/2010	2:33:05 PM	H2 MFC set to  0.000000
3/19/2010	2:33:05 PM	BCl3 MFC set to  0.000000
3/19/2010	2:33:05 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:33:05 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:33:05 PM	Tube furnace set to 0
3/19/2010	2:38:06 PM	H2 valve closed
3/19/2010	2:38:06 PM	BCl3 valve closed
3/19/2010	2:38:06 PM	PH3 valve closed
3/19/2010	2:38:06 PM	SiCl4 pre valve closed
3/19/2010	2:38:06 PM	SiCl4 post valve closed
3/19/2010	2:38:06 PM	Main Vac valve closed
3/19/2010	2:38:06 PM	Bypass valve closed
3/19/2010	2:38:06 PM	Bubbler valve closed
3/19/2010	2:38:06 PM	Helium valve opened
3/19/2010	2:38:06 PM	Helium MFC set to  500.000000
3/19/2010	2:38:06 PM	H2 MFC set to  0.000000
3/19/2010	2:38:06 PM	BCl3 MFC set to  0.000000
3/19/2010	2:38:06 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:38:06 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:38:06 PM	Tube furnace set to 0
3/19/2010	2:39:28 PM	Helium valve closed
3/19/2010	2:39:28 PM	H2 valve closed
3/19/2010	2:39:28 PM	BCl3 valve closed
3/19/2010	2:39:28 PM	PH3 valve closed
3/19/2010	2:39:28 PM	SiCl4 pre valve closed
3/19/2010	2:39:28 PM	SiCl4 post valve closed
3/19/2010	2:39:28 PM	Main Vac valve closed
3/19/2010	2:39:28 PM	Bypass valve closed
3/19/2010	2:39:28 PM	Bubbler valve closed
3/19/2010	2:39:28 PM	Helium MFC set to  0.000000
3/19/2010	2:39:28 PM	H2 MFC set to  0.000000
3/19/2010	2:39:28 PM	BCl3 MFC set to  0.000000
3/19/2010	2:39:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:39:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:39:28 PM	Tube furnace set to 0
3/19/2010	2:39:43 PM	Helium valve closed
3/19/2010	2:39:43 PM	H2 valve closed
3/19/2010	2:39:43 PM	BCl3 valve closed
3/19/2010	2:39:43 PM	PH3 valve closed
3/19/2010	2:39:43 PM	SiCl4 pre valve closed
3/19/2010	2:39:43 PM	SiCl4 post valve closed
3/19/2010	2:39:43 PM	Main Vac valve closed
3/19/2010	2:39:43 PM	Bubbler valve closed
3/19/2010	2:39:43 PM	Bypass valve opened
3/19/2010	2:39:43 PM	Helium MFC set to  0.000000
3/19/2010	2:39:43 PM	H2 MFC set to  0.000000
3/19/2010	2:39:43 PM	BCl3 MFC set to  0.000000
3/19/2010	2:39:43 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:39:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:39:43 PM	Tube furnace set to 0
3/19/2010	2:40:05 PM	Helium valve closed
3/19/2010	2:40:05 PM	H2 valve closed
3/19/2010	2:40:05 PM	BCl3 valve closed
3/19/2010	2:40:05 PM	PH3 valve closed
3/19/2010	2:40:05 PM	SiCl4 pre valve closed
3/19/2010	2:40:05 PM	SiCl4 post valve closed
3/19/2010	2:40:05 PM	Bubbler valve closed
3/19/2010	2:40:05 PM	Main Vac valve opened
3/19/2010	2:40:05 PM	Bypass valve opened
3/19/2010	2:40:05 PM	Helium MFC set to  0.000000
3/19/2010	2:40:05 PM	H2 MFC set to  0.000000
3/19/2010	2:40:05 PM	BCl3 MFC set to  0.000000
3/19/2010	2:40:05 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:40:05 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:40:05 PM	Tube furnace set to 0
3/19/2010	2:45:05 PM	H2 valve closed
3/19/2010	2:45:05 PM	BCl3 valve closed
3/19/2010	2:45:05 PM	PH3 valve closed
3/19/2010	2:45:05 PM	SiCl4 pre valve closed
3/19/2010	2:45:05 PM	SiCl4 post valve closed
3/19/2010	2:45:05 PM	Main Vac valve closed
3/19/2010	2:45:05 PM	Bypass valve closed
3/19/2010	2:45:05 PM	Bubbler valve closed
3/19/2010	2:45:05 PM	Helium valve opened
3/19/2010	2:45:05 PM	Helium MFC set to  500.000000
3/19/2010	2:45:05 PM	H2 MFC set to  0.000000
3/19/2010	2:45:05 PM	BCl3 MFC set to  0.000000
3/19/2010	2:45:05 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:45:05 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:45:05 PM	Tube furnace set to 0
3/19/2010	2:46:28 PM	Helium valve closed
3/19/2010	2:46:28 PM	H2 valve closed
3/19/2010	2:46:28 PM	BCl3 valve closed
3/19/2010	2:46:28 PM	PH3 valve closed
3/19/2010	2:46:28 PM	SiCl4 pre valve closed
3/19/2010	2:46:28 PM	SiCl4 post valve closed
3/19/2010	2:46:28 PM	Main Vac valve closed
3/19/2010	2:46:28 PM	Bypass valve closed
3/19/2010	2:46:28 PM	Bubbler valve closed
3/19/2010	2:46:28 PM	Helium MFC set to  0.000000
3/19/2010	2:46:28 PM	H2 MFC set to  0.000000
3/19/2010	2:46:28 PM	BCl3 MFC set to  0.000000
3/19/2010	2:46:28 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:46:28 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:46:28 PM	Tube furnace set to 0
3/19/2010	2:46:43 PM	Helium valve closed
3/19/2010	2:46:43 PM	H2 valve closed
3/19/2010	2:46:43 PM	BCl3 valve closed
3/19/2010	2:46:43 PM	PH3 valve closed
3/19/2010	2:46:43 PM	SiCl4 pre valve closed
3/19/2010	2:46:43 PM	SiCl4 post valve closed
3/19/2010	2:46:43 PM	Main Vac valve closed
3/19/2010	2:46:43 PM	Bubbler valve closed
3/19/2010	2:46:43 PM	Bypass valve opened
3/19/2010	2:46:43 PM	Helium MFC set to  0.000000
3/19/2010	2:46:43 PM	H2 MFC set to  0.000000
3/19/2010	2:46:43 PM	BCl3 MFC set to  0.000000
3/19/2010	2:46:43 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:46:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:46:43 PM	Tube furnace set to 0
3/19/2010	2:47:05 PM	Helium valve closed
3/19/2010	2:47:05 PM	H2 valve closed
3/19/2010	2:47:05 PM	BCl3 valve closed
3/19/2010	2:47:05 PM	PH3 valve closed
3/19/2010	2:47:05 PM	SiCl4 pre valve closed
3/19/2010	2:47:05 PM	SiCl4 post valve closed
3/19/2010	2:47:05 PM	Bubbler valve closed
3/19/2010	2:47:05 PM	Main Vac valve opened
3/19/2010	2:47:05 PM	Bypass valve opened
3/19/2010	2:47:05 PM	Helium MFC set to  0.000000
3/19/2010	2:47:05 PM	H2 MFC set to  0.000000
3/19/2010	2:47:05 PM	BCl3 MFC set to  0.000000
3/19/2010	2:47:05 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:47:05 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:47:05 PM	Tube furnace set to 0
3/19/2010	2:52:05 PM	Helium valve closed
3/19/2010	2:52:05 PM	H2 valve closed
3/19/2010	2:52:05 PM	BCl3 valve closed
3/19/2010	2:52:05 PM	PH3 valve closed
3/19/2010	2:52:05 PM	SiCl4 pre valve closed
3/19/2010	2:52:05 PM	SiCl4 post valve closed
3/19/2010	2:52:05 PM	Bubbler valve closed
3/19/2010	2:52:05 PM	Main Vac valve opened
3/19/2010	2:52:05 PM	Bypass valve opened
3/19/2010	2:52:05 PM	Helium MFC set to  0.000000
3/19/2010	2:52:05 PM	H2 MFC set to  0.000000
3/19/2010	2:52:05 PM	BCl3 MFC set to  0.000000
3/19/2010	2:52:05 PM	SiCl4 MFC set to  0.000000
3/19/2010	2:52:05 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	2:52:05 PM	Tube furnace set to 0
3/19/2010	2:52:06 PM	Run finished at 2:52 PM
3/19/2010	2:52:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	3:07:17 PM	Main Vac valve closed
3/19/2010	3:07:19 PM	Bypass valve closed
3/19/2010	3:07:33 PM	Main Vac valve opened
3/19/2010	3:07:33 PM	Bypass valve opened
3/19/2010	3:07:37 PM	Recipe started at 3:07 PM
3/19/2010	3:07:37 PM	Helium valve closed
3/19/2010	3:07:37 PM	BCl3 valve closed
3/19/2010	3:07:37 PM	PH3 valve closed
3/19/2010	3:07:37 PM	SiCl4 pre valve closed
3/19/2010	3:07:37 PM	SiCl4 post valve closed
3/19/2010	3:07:37 PM	Main Vac valve closed
3/19/2010	3:07:37 PM	Bypass valve closed
3/19/2010	3:07:37 PM	Bubbler valve closed
3/19/2010	3:07:37 PM	H2 valve opened
3/19/2010	3:07:37 PM	Helium MFC set to  0.000000
3/19/2010	3:07:37 PM	H2 MFC set to  500.000000
3/19/2010	3:07:37 PM	BCl3 MFC set to  0.000000
3/19/2010	3:07:37 PM	SiCl4 MFC set to  0.000000
3/19/2010	3:07:37 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	3:07:37 PM	Tube furnace set to 0
3/19/2010	3:08:56 PM	Helium valve closed
3/19/2010	3:08:56 PM	BCl3 valve closed
3/19/2010	3:08:56 PM	PH3 valve closed
3/19/2010	3:08:56 PM	SiCl4 pre valve closed
3/19/2010	3:08:56 PM	SiCl4 post valve closed
3/19/2010	3:08:56 PM	Main Vac valve closed
3/19/2010	3:08:56 PM	Bypass valve closed
3/19/2010	3:08:56 PM	H2 valve opened
3/19/2010	3:08:56 PM	Bubbler valve opened
3/19/2010	3:08:56 PM	Helium MFC set to  0.000000
3/19/2010	3:08:56 PM	H2 MFC set to  500.000000
3/19/2010	3:08:56 PM	BCl3 MFC set to  0.000000
3/19/2010	3:08:56 PM	SiCl4 MFC set to  0.000000
3/19/2010	3:08:56 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	3:08:56 PM	Tube furnace set to 0
3/19/2010	3:28:56 PM	Helium valve closed
3/19/2010	3:28:56 PM	BCl3 valve closed
3/19/2010	3:28:56 PM	PH3 valve closed
3/19/2010	3:28:56 PM	Main Vac valve closed
3/19/2010	3:28:56 PM	Bypass valve closed
3/19/2010	3:28:56 PM	H2 valve opened
3/19/2010	3:28:56 PM	SiCl4 pre valve opened
3/19/2010	3:28:56 PM	SiCl4 post valve opened
3/19/2010	3:28:56 PM	Bubbler valve opened
3/19/2010	3:28:56 PM	Helium MFC set to  0.000000
3/19/2010	3:28:56 PM	H2 MFC set to  500.000000
3/19/2010	3:28:56 PM	BCl3 MFC set to  0.000000
3/19/2010	3:28:56 PM	SiCl4 MFC set to  325.000000
3/19/2010	3:28:56 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	3:28:56 PM	Tube furnace set to 0
3/19/2010	3:43:57 PM	Helium valve closed
3/19/2010	3:43:57 PM	BCl3 valve closed
3/19/2010	3:43:57 PM	PH3 valve closed
3/19/2010	3:43:57 PM	SiCl4 pre valve closed
3/19/2010	3:43:57 PM	SiCl4 post valve closed
3/19/2010	3:43:57 PM	Main Vac valve closed
3/19/2010	3:43:57 PM	Bypass valve closed
3/19/2010	3:43:57 PM	H2 valve opened
3/19/2010	3:43:57 PM	Bubbler valve opened
3/19/2010	3:43:57 PM	Helium MFC set to  0.000000
3/19/2010	3:43:57 PM	H2 MFC set to  500.000000
3/19/2010	3:43:57 PM	BCl3 MFC set to  0.000000
3/19/2010	3:43:57 PM	SiCl4 MFC set to  0.000000
3/19/2010	3:43:57 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	3:43:57 PM	Tube furnace set to 0
3/19/2010	4:03:57 PM	H2 valve closed
3/19/2010	4:03:57 PM	BCl3 valve closed
3/19/2010	4:03:57 PM	PH3 valve closed
3/19/2010	4:03:57 PM	SiCl4 pre valve closed
3/19/2010	4:03:57 PM	SiCl4 post valve closed
3/19/2010	4:03:57 PM	Main Vac valve closed
3/19/2010	4:03:57 PM	Bypass valve closed
3/19/2010	4:03:57 PM	Helium valve opened
3/19/2010	4:03:57 PM	Bubbler valve opened
3/19/2010	4:03:57 PM	Helium MFC set to  500.000000
3/19/2010	4:03:57 PM	H2 MFC set to  0.000000
3/19/2010	4:03:57 PM	BCl3 MFC set to  0.000000
3/19/2010	4:03:57 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:03:57 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:03:57 PM	Tube furnace set to 0
3/19/2010	4:23:57 PM	Helium valve closed
3/19/2010	4:23:57 PM	H2 valve closed
3/19/2010	4:23:57 PM	BCl3 valve closed
3/19/2010	4:23:57 PM	PH3 valve closed
3/19/2010	4:23:57 PM	SiCl4 pre valve closed
3/19/2010	4:23:57 PM	SiCl4 post valve closed
3/19/2010	4:23:57 PM	Main Vac valve closed
3/19/2010	4:23:57 PM	Bypass valve closed
3/19/2010	4:23:57 PM	Bubbler valve closed
3/19/2010	4:23:57 PM	Helium MFC set to  0.000000
3/19/2010	4:23:57 PM	H2 MFC set to  0.000000
3/19/2010	4:23:57 PM	BCl3 MFC set to  0.000000
3/19/2010	4:23:57 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:23:57 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:23:57 PM	Tube furnace set to 0
3/19/2010	4:23:57 PM	Run finished at 4:23 PM
3/19/2010	4:49:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	4:49:25 PM	Recipe started at 4:49 PM
3/19/2010	4:49:25 PM	H2 valve closed
3/19/2010	4:49:25 PM	BCl3 valve closed
3/19/2010	4:49:25 PM	PH3 valve closed
3/19/2010	4:49:25 PM	SiCl4 pre valve closed
3/19/2010	4:49:25 PM	SiCl4 post valve closed
3/19/2010	4:49:25 PM	Main Vac valve closed
3/19/2010	4:49:25 PM	Bypass valve closed
3/19/2010	4:49:25 PM	Bubbler valve closed
3/19/2010	4:49:25 PM	Helium valve opened
3/19/2010	4:49:25 PM	Helium MFC set to  500.000000
3/19/2010	4:49:25 PM	H2 MFC set to  0.000000
3/19/2010	4:49:25 PM	BCl3 MFC set to  0.000000
3/19/2010	4:49:25 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:49:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:49:25 PM	Tube furnace set to 0
3/19/2010	4:49:25 PM	Helium valve closed
3/19/2010	4:49:25 PM	H2 valve closed
3/19/2010	4:49:25 PM	BCl3 valve closed
3/19/2010	4:49:25 PM	PH3 valve closed
3/19/2010	4:49:25 PM	SiCl4 pre valve closed
3/19/2010	4:49:25 PM	SiCl4 post valve closed
3/19/2010	4:49:25 PM	Main Vac valve closed
3/19/2010	4:49:25 PM	Bypass valve closed
3/19/2010	4:49:25 PM	Bubbler valve closed
3/19/2010	4:49:25 PM	Helium MFC set to  0.000000
3/19/2010	4:49:25 PM	H2 MFC set to  0.000000
3/19/2010	4:49:25 PM	BCl3 MFC set to  0.000000
3/19/2010	4:49:25 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:49:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:49:25 PM	Tube furnace set to 0
3/19/2010	4:49:25 PM	Run finished at 4:49 PM
3/19/2010	4:49:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	4:49:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	4:49:30 PM	Recipe started at 4:49 PM
3/19/2010	4:49:30 PM	Helium valve closed
3/19/2010	4:49:30 PM	H2 valve closed
3/19/2010	4:49:30 PM	BCl3 valve closed
3/19/2010	4:49:30 PM	PH3 valve closed
3/19/2010	4:49:30 PM	SiCl4 pre valve closed
3/19/2010	4:49:30 PM	SiCl4 post valve closed
3/19/2010	4:49:30 PM	Main Vac valve closed
3/19/2010	4:49:30 PM	Bubbler valve closed
3/19/2010	4:49:30 PM	Bypass valve opened
3/19/2010	4:49:30 PM	Helium MFC set to  0.000000
3/19/2010	4:49:30 PM	H2 MFC set to  0.000000
3/19/2010	4:49:30 PM	BCl3 MFC set to  0.000000
3/19/2010	4:49:30 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:49:30 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:49:30 PM	Tube furnace set to 0
3/19/2010	4:50:02 PM	Helium valve closed
3/19/2010	4:50:02 PM	H2 valve closed
3/19/2010	4:50:02 PM	BCl3 valve closed
3/19/2010	4:50:02 PM	PH3 valve closed
3/19/2010	4:50:02 PM	SiCl4 pre valve closed
3/19/2010	4:50:02 PM	SiCl4 post valve closed
3/19/2010	4:50:02 PM	Bubbler valve closed
3/19/2010	4:50:02 PM	Main Vac valve opened
3/19/2010	4:50:02 PM	Bypass valve opened
3/19/2010	4:50:02 PM	Helium MFC set to  0.000000
3/19/2010	4:50:02 PM	H2 MFC set to  0.000000
3/19/2010	4:50:02 PM	BCl3 MFC set to  0.000000
3/19/2010	4:50:02 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:50:02 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:50:02 PM	Tube furnace set to 0
3/19/2010	4:50:03 PM	Run finished at 4:50 PM
3/19/2010	4:50:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	4:51:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	4:51:30 PM	Recipe started at 4:51 PM
3/19/2010	4:51:30 PM	H2 valve closed
3/19/2010	4:51:30 PM	BCl3 valve closed
3/19/2010	4:51:31 PM	PH3 valve closed
3/19/2010	4:51:31 PM	SiCl4 pre valve closed
3/19/2010	4:51:31 PM	SiCl4 post valve closed
3/19/2010	4:51:31 PM	Main Vac valve closed
3/19/2010	4:51:31 PM	Bypass valve closed
3/19/2010	4:51:31 PM	Bubbler valve closed
3/19/2010	4:51:31 PM	Helium valve opened
3/19/2010	4:51:31 PM	Helium MFC set to  500.000000
3/19/2010	4:51:31 PM	H2 MFC set to  0.000000
3/19/2010	4:51:31 PM	BCl3 MFC set to  0.000000
3/19/2010	4:51:31 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:51:31 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:51:31 PM	Tube furnace set to 0
3/19/2010	4:52:52 PM	Helium valve closed
3/19/2010	4:52:52 PM	H2 valve closed
3/19/2010	4:52:52 PM	BCl3 valve closed
3/19/2010	4:52:52 PM	PH3 valve closed
3/19/2010	4:52:52 PM	SiCl4 pre valve closed
3/19/2010	4:52:52 PM	SiCl4 post valve closed
3/19/2010	4:52:52 PM	Main Vac valve closed
3/19/2010	4:52:52 PM	Bypass valve closed
3/19/2010	4:52:52 PM	Bubbler valve closed
3/19/2010	4:52:52 PM	Helium MFC set to  0.000000
3/19/2010	4:52:52 PM	H2 MFC set to  0.000000
3/19/2010	4:52:52 PM	BCl3 MFC set to  0.000000
3/19/2010	4:52:52 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:52:52 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:52:52 PM	Tube furnace set to 0
3/19/2010	4:53:07 PM	Helium valve closed
3/19/2010	4:53:07 PM	H2 valve closed
3/19/2010	4:53:07 PM	BCl3 valve closed
3/19/2010	4:53:07 PM	PH3 valve closed
3/19/2010	4:53:07 PM	SiCl4 pre valve closed
3/19/2010	4:53:07 PM	SiCl4 post valve closed
3/19/2010	4:53:07 PM	Main Vac valve closed
3/19/2010	4:53:07 PM	Bubbler valve closed
3/19/2010	4:53:07 PM	Bypass valve opened
3/19/2010	4:53:07 PM	Helium MFC set to  0.000000
3/19/2010	4:53:07 PM	H2 MFC set to  0.000000
3/19/2010	4:53:07 PM	BCl3 MFC set to  0.000000
3/19/2010	4:53:07 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:53:07 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:53:07 PM	Tube furnace set to 0
3/19/2010	4:53:30 PM	Helium valve closed
3/19/2010	4:53:30 PM	H2 valve closed
3/19/2010	4:53:30 PM	BCl3 valve closed
3/19/2010	4:53:30 PM	PH3 valve closed
3/19/2010	4:53:30 PM	SiCl4 pre valve closed
3/19/2010	4:53:30 PM	SiCl4 post valve closed
3/19/2010	4:53:30 PM	Bubbler valve closed
3/19/2010	4:53:30 PM	Main Vac valve opened
3/19/2010	4:53:30 PM	Bypass valve opened
3/19/2010	4:53:30 PM	Helium MFC set to  0.000000
3/19/2010	4:53:30 PM	H2 MFC set to  0.000000
3/19/2010	4:53:30 PM	BCl3 MFC set to  0.000000
3/19/2010	4:53:30 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:53:30 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:53:30 PM	Tube furnace set to 0
3/19/2010	4:54:01 PM	Run aborted at 4:54 PM
3/19/2010	4:54:01 PM	Helium valve closed
3/19/2010	4:54:01 PM	H2 valve closed
3/19/2010	4:54:01 PM	BCl3 valve closed
3/19/2010	4:54:01 PM	PH3 valve closed
3/19/2010	4:54:01 PM	SiCl4 pre valve closed
3/19/2010	4:54:01 PM	SiCl4 post valve closed
3/19/2010	4:54:01 PM	Bypass valve closed
3/19/2010	4:54:01 PM	Main Vac valve closed
3/19/2010	4:54:01 PM	Bubbler valve closed
3/19/2010	4:54:01 PM	Helium MFC set to  0.000000
3/19/2010	4:54:01 PM	H2 MFC set to  0.000000
3/19/2010	4:54:01 PM	BCl3 MFC set to  0.000000
3/19/2010	4:54:01 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:54:01 PM	Tube furnace set to 0
3/19/2010	4:54:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	4:54:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	4:54:08 PM	Recipe started at 4:54 PM
3/19/2010	4:54:08 PM	H2 valve closed
3/19/2010	4:54:08 PM	BCl3 valve closed
3/19/2010	4:54:08 PM	PH3 valve closed
3/19/2010	4:54:08 PM	SiCl4 pre valve closed
3/19/2010	4:54:08 PM	SiCl4 post valve closed
3/19/2010	4:54:08 PM	Main Vac valve closed
3/19/2010	4:54:08 PM	Bypass valve closed
3/19/2010	4:54:08 PM	Bubbler valve closed
3/19/2010	4:54:08 PM	Helium valve opened
3/19/2010	4:54:08 PM	Helium MFC set to  500.000000
3/19/2010	4:54:08 PM	H2 MFC set to  0.000000
3/19/2010	4:54:08 PM	BCl3 MFC set to  0.000000
3/19/2010	4:54:08 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:54:08 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:54:08 PM	Tube furnace set to 0
3/19/2010	4:54:35 PM	Helium valve closed
3/19/2010	4:54:35 PM	H2 valve closed
3/19/2010	4:54:35 PM	BCl3 valve closed
3/19/2010	4:54:35 PM	PH3 valve closed
3/19/2010	4:54:35 PM	SiCl4 pre valve closed
3/19/2010	4:54:35 PM	SiCl4 post valve closed
3/19/2010	4:54:35 PM	Main Vac valve closed
3/19/2010	4:54:35 PM	Bypass valve closed
3/19/2010	4:54:35 PM	Bubbler valve closed
3/19/2010	4:54:35 PM	Helium MFC set to  0.000000
3/19/2010	4:54:35 PM	H2 MFC set to  0.000000
3/19/2010	4:54:35 PM	BCl3 MFC set to  0.000000
3/19/2010	4:54:35 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:54:35 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:54:35 PM	Tube furnace set to 0
3/19/2010	4:54:35 PM	Run finished at 4:54 PM
3/19/2010	4:54:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2010	4:57:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	4:57:43 PM	Recipe started at 4:57 PM
3/19/2010	4:57:43 PM	Helium valve closed
3/19/2010	4:57:43 PM	H2 valve closed
3/19/2010	4:57:43 PM	BCl3 valve closed
3/19/2010	4:57:43 PM	PH3 valve closed
3/19/2010	4:57:43 PM	SiCl4 pre valve closed
3/19/2010	4:57:43 PM	SiCl4 post valve closed
3/19/2010	4:57:43 PM	Main Vac valve closed
3/19/2010	4:57:43 PM	Bubbler valve closed
3/19/2010	4:57:43 PM	Bypass valve opened
3/19/2010	4:57:43 PM	Helium MFC set to  0.000000
3/19/2010	4:57:43 PM	H2 MFC set to  0.000000
3/19/2010	4:57:43 PM	BCl3 MFC set to  0.000000
3/19/2010	4:57:43 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:57:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:57:43 PM	Tube furnace set to 0
3/19/2010	4:58:16 PM	Helium valve closed
3/19/2010	4:58:16 PM	H2 valve closed
3/19/2010	4:58:16 PM	BCl3 valve closed
3/19/2010	4:58:16 PM	PH3 valve closed
3/19/2010	4:58:16 PM	SiCl4 pre valve closed
3/19/2010	4:58:16 PM	SiCl4 post valve closed
3/19/2010	4:58:16 PM	Bubbler valve closed
3/19/2010	4:58:16 PM	Main Vac valve opened
3/19/2010	4:58:16 PM	Bypass valve opened
3/19/2010	4:58:16 PM	Helium MFC set to  0.000000
3/19/2010	4:58:16 PM	H2 MFC set to  0.000000
3/19/2010	4:58:16 PM	BCl3 MFC set to  0.000000
3/19/2010	4:58:16 PM	SiCl4 MFC set to  0.000000
3/19/2010	4:58:16 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	4:58:16 PM	Tube furnace set to 0
3/19/2010	4:58:17 PM	Run finished at 4:58 PM
3/19/2010	4:58:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2010	5:00:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	5:00:10 PM	Recipe started at 5:00 PM
3/19/2010	5:00:10 PM	H2 valve closed
3/19/2010	5:00:10 PM	BCl3 valve closed
3/19/2010	5:00:10 PM	PH3 valve closed
3/19/2010	5:00:10 PM	SiCl4 pre valve closed
3/19/2010	5:00:10 PM	SiCl4 post valve closed
3/19/2010	5:00:10 PM	Main Vac valve closed
3/19/2010	5:00:10 PM	Bypass valve closed
3/19/2010	5:00:10 PM	Bubbler valve closed
3/19/2010	5:00:10 PM	Helium valve opened
3/19/2010	5:00:10 PM	Helium MFC set to  500.000000
3/19/2010	5:00:10 PM	H2 MFC set to  0.000000
3/19/2010	5:00:10 PM	BCl3 MFC set to  0.000000
3/19/2010	5:00:10 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:00:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:00:10 PM	Tube furnace set to 0
3/19/2010	5:01:32 PM	Helium valve closed
3/19/2010	5:01:32 PM	H2 valve closed
3/19/2010	5:01:32 PM	BCl3 valve closed
3/19/2010	5:01:32 PM	PH3 valve closed
3/19/2010	5:01:32 PM	SiCl4 pre valve closed
3/19/2010	5:01:32 PM	SiCl4 post valve closed
3/19/2010	5:01:32 PM	Main Vac valve closed
3/19/2010	5:01:32 PM	Bypass valve closed
3/19/2010	5:01:32 PM	Bubbler valve closed
3/19/2010	5:01:32 PM	Helium MFC set to  0.000000
3/19/2010	5:01:32 PM	H2 MFC set to  0.000000
3/19/2010	5:01:32 PM	BCl3 MFC set to  0.000000
3/19/2010	5:01:32 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:01:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:01:32 PM	Tube furnace set to 0
3/19/2010	5:01:47 PM	Helium valve closed
3/19/2010	5:01:47 PM	H2 valve closed
3/19/2010	5:01:47 PM	BCl3 valve closed
3/19/2010	5:01:47 PM	PH3 valve closed
3/19/2010	5:01:47 PM	SiCl4 pre valve closed
3/19/2010	5:01:47 PM	SiCl4 post valve closed
3/19/2010	5:01:47 PM	Main Vac valve closed
3/19/2010	5:01:47 PM	Bubbler valve closed
3/19/2010	5:01:47 PM	Bypass valve opened
3/19/2010	5:01:47 PM	Helium MFC set to  0.000000
3/19/2010	5:01:47 PM	H2 MFC set to  0.000000
3/19/2010	5:01:47 PM	BCl3 MFC set to  0.000000
3/19/2010	5:01:47 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:01:47 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:01:47 PM	Tube furnace set to 0
3/19/2010	5:02:09 PM	Helium valve closed
3/19/2010	5:02:09 PM	H2 valve closed
3/19/2010	5:02:09 PM	BCl3 valve closed
3/19/2010	5:02:09 PM	PH3 valve closed
3/19/2010	5:02:09 PM	SiCl4 pre valve closed
3/19/2010	5:02:09 PM	SiCl4 post valve closed
3/19/2010	5:02:09 PM	Bubbler valve closed
3/19/2010	5:02:10 PM	Main Vac valve opened
3/19/2010	5:02:10 PM	Bypass valve opened
3/19/2010	5:02:10 PM	Helium MFC set to  0.000000
3/19/2010	5:02:10 PM	H2 MFC set to  0.000000
3/19/2010	5:02:10 PM	BCl3 MFC set to  0.000000
3/19/2010	5:02:10 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:02:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:02:10 PM	Tube furnace set to 0
3/19/2010	5:07:10 PM	H2 valve closed
3/19/2010	5:07:10 PM	BCl3 valve closed
3/19/2010	5:07:10 PM	PH3 valve closed
3/19/2010	5:07:10 PM	SiCl4 pre valve closed
3/19/2010	5:07:10 PM	SiCl4 post valve closed
3/19/2010	5:07:10 PM	Main Vac valve closed
3/19/2010	5:07:10 PM	Bypass valve closed
3/19/2010	5:07:10 PM	Bubbler valve closed
3/19/2010	5:07:10 PM	Helium valve opened
3/19/2010	5:07:10 PM	Helium MFC set to  500.000000
3/19/2010	5:07:10 PM	H2 MFC set to  0.000000
3/19/2010	5:07:10 PM	BCl3 MFC set to  0.000000
3/19/2010	5:07:10 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:07:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:07:10 PM	Tube furnace set to 0
3/19/2010	5:08:32 PM	Helium valve closed
3/19/2010	5:08:32 PM	H2 valve closed
3/19/2010	5:08:32 PM	BCl3 valve closed
3/19/2010	5:08:32 PM	PH3 valve closed
3/19/2010	5:08:32 PM	SiCl4 pre valve closed
3/19/2010	5:08:32 PM	SiCl4 post valve closed
3/19/2010	5:08:32 PM	Main Vac valve closed
3/19/2010	5:08:32 PM	Bypass valve closed
3/19/2010	5:08:32 PM	Bubbler valve closed
3/19/2010	5:08:32 PM	Helium MFC set to  0.000000
3/19/2010	5:08:32 PM	H2 MFC set to  0.000000
3/19/2010	5:08:32 PM	BCl3 MFC set to  0.000000
3/19/2010	5:08:32 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:08:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:08:32 PM	Tube furnace set to 0
3/19/2010	5:08:47 PM	Helium valve closed
3/19/2010	5:08:47 PM	H2 valve closed
3/19/2010	5:08:47 PM	BCl3 valve closed
3/19/2010	5:08:47 PM	PH3 valve closed
3/19/2010	5:08:47 PM	SiCl4 pre valve closed
3/19/2010	5:08:47 PM	SiCl4 post valve closed
3/19/2010	5:08:47 PM	Main Vac valve closed
3/19/2010	5:08:47 PM	Bubbler valve closed
3/19/2010	5:08:47 PM	Bypass valve opened
3/19/2010	5:08:47 PM	Helium MFC set to  0.000000
3/19/2010	5:08:47 PM	H2 MFC set to  0.000000
3/19/2010	5:08:47 PM	BCl3 MFC set to  0.000000
3/19/2010	5:08:47 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:08:47 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:08:47 PM	Tube furnace set to 0
3/19/2010	5:09:10 PM	Helium valve closed
3/19/2010	5:09:10 PM	H2 valve closed
3/19/2010	5:09:10 PM	BCl3 valve closed
3/19/2010	5:09:10 PM	PH3 valve closed
3/19/2010	5:09:10 PM	SiCl4 pre valve closed
3/19/2010	5:09:10 PM	SiCl4 post valve closed
3/19/2010	5:09:10 PM	Bubbler valve closed
3/19/2010	5:09:10 PM	Main Vac valve opened
3/19/2010	5:09:10 PM	Bypass valve opened
3/19/2010	5:09:10 PM	Helium MFC set to  0.000000
3/19/2010	5:09:10 PM	H2 MFC set to  0.000000
3/19/2010	5:09:10 PM	BCl3 MFC set to  0.000000
3/19/2010	5:09:10 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:09:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:09:10 PM	Tube furnace set to 0
3/19/2010	5:14:10 PM	H2 valve closed
3/19/2010	5:14:10 PM	BCl3 valve closed
3/19/2010	5:14:10 PM	PH3 valve closed
3/19/2010	5:14:10 PM	SiCl4 pre valve closed
3/19/2010	5:14:10 PM	SiCl4 post valve closed
3/19/2010	5:14:10 PM	Main Vac valve closed
3/19/2010	5:14:10 PM	Bypass valve closed
3/19/2010	5:14:10 PM	Bubbler valve closed
3/19/2010	5:14:10 PM	Helium valve opened
3/19/2010	5:14:10 PM	Helium MFC set to  500.000000
3/19/2010	5:14:10 PM	H2 MFC set to  0.000000
3/19/2010	5:14:10 PM	BCl3 MFC set to  0.000000
3/19/2010	5:14:10 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:14:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:14:10 PM	Tube furnace set to 0
3/19/2010	5:15:32 PM	Helium valve closed
3/19/2010	5:15:32 PM	H2 valve closed
3/19/2010	5:15:32 PM	BCl3 valve closed
3/19/2010	5:15:32 PM	PH3 valve closed
3/19/2010	5:15:32 PM	SiCl4 pre valve closed
3/19/2010	5:15:32 PM	SiCl4 post valve closed
3/19/2010	5:15:32 PM	Main Vac valve closed
3/19/2010	5:15:32 PM	Bypass valve closed
3/19/2010	5:15:32 PM	Bubbler valve closed
3/19/2010	5:15:32 PM	Helium MFC set to  0.000000
3/19/2010	5:15:32 PM	H2 MFC set to  0.000000
3/19/2010	5:15:32 PM	BCl3 MFC set to  0.000000
3/19/2010	5:15:32 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:15:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:15:32 PM	Tube furnace set to 0
3/19/2010	5:15:40 PM	Helium valve closed
3/19/2010	5:15:40 PM	H2 valve closed
3/19/2010	5:15:40 PM	BCl3 valve closed
3/19/2010	5:15:40 PM	PH3 valve closed
3/19/2010	5:15:40 PM	SiCl4 pre valve closed
3/19/2010	5:15:40 PM	SiCl4 post valve closed
3/19/2010	5:15:40 PM	Main Vac valve closed
3/19/2010	5:15:40 PM	Bubbler valve closed
3/19/2010	5:15:40 PM	Bypass valve opened
3/19/2010	5:15:40 PM	Helium MFC set to  0.000000
3/19/2010	5:15:40 PM	H2 MFC set to  0.000000
3/19/2010	5:15:40 PM	BCl3 MFC set to  0.000000
3/19/2010	5:15:40 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:15:40 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:15:40 PM	Tube furnace set to 0
3/19/2010	5:16:02 PM	Helium valve closed
3/19/2010	5:16:02 PM	H2 valve closed
3/19/2010	5:16:02 PM	BCl3 valve closed
3/19/2010	5:16:02 PM	PH3 valve closed
3/19/2010	5:16:02 PM	SiCl4 pre valve closed
3/19/2010	5:16:02 PM	SiCl4 post valve closed
3/19/2010	5:16:02 PM	Bubbler valve closed
3/19/2010	5:16:02 PM	Main Vac valve opened
3/19/2010	5:16:02 PM	Bypass valve opened
3/19/2010	5:16:02 PM	Helium MFC set to  0.000000
3/19/2010	5:16:02 PM	H2 MFC set to  0.000000
3/19/2010	5:16:02 PM	BCl3 MFC set to  0.000000
3/19/2010	5:16:02 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:16:02 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:16:02 PM	Tube furnace set to 0
3/19/2010	5:17:49 PM	Run aborted at 5:17 PM
3/19/2010	5:17:49 PM	Helium valve closed
3/19/2010	5:17:49 PM	H2 valve closed
3/19/2010	5:17:49 PM	BCl3 valve closed
3/19/2010	5:17:49 PM	PH3 valve closed
3/19/2010	5:17:49 PM	SiCl4 pre valve closed
3/19/2010	5:17:49 PM	SiCl4 post valve closed
3/19/2010	5:17:49 PM	Bypass valve closed
3/19/2010	5:17:49 PM	Main Vac valve closed
3/19/2010	5:17:49 PM	Bubbler valve closed
3/19/2010	5:17:49 PM	Helium MFC set to  0.000000
3/19/2010	5:17:49 PM	H2 MFC set to  0.000000
3/19/2010	5:17:49 PM	BCl3 MFC set to  0.000000
3/19/2010	5:17:49 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:17:49 PM	Tube furnace set to 0
3/19/2010	5:17:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	5:18:10 PM	Recipe started at 5:18 PM
3/19/2010	5:18:10 PM	Helium valve closed
3/19/2010	5:18:10 PM	BCl3 valve closed
3/19/2010	5:18:10 PM	PH3 valve closed
3/19/2010	5:18:10 PM	SiCl4 pre valve closed
3/19/2010	5:18:10 PM	SiCl4 post valve closed
3/19/2010	5:18:11 PM	Main Vac valve closed
3/19/2010	5:18:11 PM	Bypass valve closed
3/19/2010	5:18:11 PM	Bubbler valve closed
3/19/2010	5:18:11 PM	H2 valve opened
3/19/2010	5:18:11 PM	Helium MFC set to  0.000000
3/19/2010	5:18:11 PM	H2 MFC set to  500.000000
3/19/2010	5:18:11 PM	BCl3 MFC set to  0.000000
3/19/2010	5:18:11 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:18:11 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:18:11 PM	Tube furnace set to 0
3/19/2010	5:19:30 PM	Helium valve closed
3/19/2010	5:19:30 PM	BCl3 valve closed
3/19/2010	5:19:30 PM	PH3 valve closed
3/19/2010	5:19:30 PM	SiCl4 pre valve closed
3/19/2010	5:19:30 PM	SiCl4 post valve closed
3/19/2010	5:19:30 PM	Main Vac valve closed
3/19/2010	5:19:30 PM	Bypass valve closed
3/19/2010	5:19:30 PM	H2 valve opened
3/19/2010	5:19:30 PM	Bubbler valve opened
3/19/2010	5:19:30 PM	Helium MFC set to  0.000000
3/19/2010	5:19:30 PM	H2 MFC set to  500.000000
3/19/2010	5:19:30 PM	BCl3 MFC set to  0.000000
3/19/2010	5:19:30 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:19:30 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:19:30 PM	Tube furnace set to 0
3/19/2010	5:39:30 PM	Helium valve closed
3/19/2010	5:39:31 PM	BCl3 valve closed
3/19/2010	5:39:31 PM	PH3 valve closed
3/19/2010	5:39:31 PM	Main Vac valve closed
3/19/2010	5:39:31 PM	Bypass valve closed
3/19/2010	5:39:31 PM	H2 valve opened
3/19/2010	5:39:31 PM	SiCl4 pre valve opened
3/19/2010	5:39:31 PM	SiCl4 post valve opened
3/19/2010	5:39:31 PM	Bubbler valve opened
3/19/2010	5:39:31 PM	Helium MFC set to  0.000000
3/19/2010	5:39:31 PM	H2 MFC set to  500.000000
3/19/2010	5:39:31 PM	BCl3 MFC set to  0.000000
3/19/2010	5:39:31 PM	SiCl4 MFC set to  325.000000
3/19/2010	5:39:31 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:39:31 PM	Tube furnace set to 0
3/19/2010	5:54:31 PM	Helium valve closed
3/19/2010	5:54:31 PM	BCl3 valve closed
3/19/2010	5:54:31 PM	PH3 valve closed
3/19/2010	5:54:31 PM	SiCl4 pre valve closed
3/19/2010	5:54:31 PM	SiCl4 post valve closed
3/19/2010	5:54:31 PM	Main Vac valve closed
3/19/2010	5:54:31 PM	Bypass valve closed
3/19/2010	5:54:31 PM	H2 valve opened
3/19/2010	5:54:31 PM	Bubbler valve opened
3/19/2010	5:54:31 PM	Helium MFC set to  0.000000
3/19/2010	5:54:31 PM	H2 MFC set to  500.000000
3/19/2010	5:54:31 PM	BCl3 MFC set to  0.000000
3/19/2010	5:54:31 PM	SiCl4 MFC set to  0.000000
3/19/2010	5:54:31 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	5:54:31 PM	Tube furnace set to 0
3/19/2010	6:14:31 PM	H2 valve closed
3/19/2010	6:14:31 PM	BCl3 valve closed
3/19/2010	6:14:31 PM	PH3 valve closed
3/19/2010	6:14:31 PM	SiCl4 pre valve closed
3/19/2010	6:14:31 PM	SiCl4 post valve closed
3/19/2010	6:14:31 PM	Main Vac valve closed
3/19/2010	6:14:31 PM	Bypass valve closed
3/19/2010	6:14:31 PM	Helium valve opened
3/19/2010	6:14:31 PM	Bubbler valve opened
3/19/2010	6:14:31 PM	Helium MFC set to  500.000000
3/19/2010	6:14:31 PM	H2 MFC set to  0.000000
3/19/2010	6:14:31 PM	BCl3 MFC set to  0.000000
3/19/2010	6:14:31 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:14:31 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:14:31 PM	Tube furnace set to 0
3/19/2010	6:16:59 PM	Run aborted at 6:16 PM
3/19/2010	6:16:59 PM	Helium valve closed
3/19/2010	6:16:59 PM	H2 valve closed
3/19/2010	6:16:59 PM	BCl3 valve closed
3/19/2010	6:16:59 PM	PH3 valve closed
3/19/2010	6:16:59 PM	SiCl4 pre valve closed
3/19/2010	6:16:59 PM	SiCl4 post valve closed
3/19/2010	6:16:59 PM	Bypass valve closed
3/19/2010	6:16:59 PM	Main Vac valve closed
3/19/2010	6:16:59 PM	Bubbler valve closed
3/19/2010	6:16:59 PM	Helium MFC set to  0.000000
3/19/2010	6:16:59 PM	H2 MFC set to  0.000000
3/19/2010	6:16:59 PM	BCl3 MFC set to  0.000000
3/19/2010	6:16:59 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:16:59 PM	Tube furnace set to 0
3/19/2010	6:25:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	6:25:31 PM	Recipe started at 6:25 PM
3/19/2010	6:25:31 PM	H2 valve closed
3/19/2010	6:25:31 PM	BCl3 valve closed
3/19/2010	6:25:31 PM	PH3 valve closed
3/19/2010	6:25:31 PM	SiCl4 pre valve closed
3/19/2010	6:25:31 PM	SiCl4 post valve closed
3/19/2010	6:25:31 PM	Main Vac valve closed
3/19/2010	6:25:31 PM	Bypass valve closed
3/19/2010	6:25:31 PM	Bubbler valve closed
3/19/2010	6:25:31 PM	Helium valve opened
3/19/2010	6:25:31 PM	Helium MFC set to  500.000000
3/19/2010	6:25:31 PM	H2 MFC set to  0.000000
3/19/2010	6:25:31 PM	BCl3 MFC set to  0.000000
3/19/2010	6:25:31 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:25:31 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:25:31 PM	Tube furnace set to 0
3/19/2010	6:25:58 PM	Run aborted at 6:25 PM
3/19/2010	6:25:58 PM	Helium valve closed
3/19/2010	6:25:58 PM	H2 valve closed
3/19/2010	6:25:58 PM	BCl3 valve closed
3/19/2010	6:25:58 PM	PH3 valve closed
3/19/2010	6:25:58 PM	SiCl4 pre valve closed
3/19/2010	6:25:58 PM	SiCl4 post valve closed
3/19/2010	6:25:58 PM	Bypass valve closed
3/19/2010	6:25:58 PM	Main Vac valve closed
3/19/2010	6:25:58 PM	Bubbler valve closed
3/19/2010	6:25:58 PM	Helium MFC set to  0.000000
3/19/2010	6:25:58 PM	H2 MFC set to  0.000000
3/19/2010	6:25:58 PM	BCl3 MFC set to  0.000000
3/19/2010	6:25:58 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:25:58 PM	Tube furnace set to 0
3/19/2010	6:25:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	6:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/19/2010	6:26:54 PM	Recipe started at 6:26 PM
3/19/2010	6:26:54 PM	H2 valve closed
3/19/2010	6:26:54 PM	BCl3 valve closed
3/19/2010	6:26:54 PM	PH3 valve closed
3/19/2010	6:26:54 PM	SiCl4 pre valve closed
3/19/2010	6:26:54 PM	SiCl4 post valve closed
3/19/2010	6:26:54 PM	Main Vac valve closed
3/19/2010	6:26:54 PM	Bypass valve closed
3/19/2010	6:26:54 PM	Bubbler valve closed
3/19/2010	6:26:54 PM	Helium valve opened
3/19/2010	6:26:54 PM	Helium MFC set to  500.000000
3/19/2010	6:26:54 PM	H2 MFC set to  0.000000
3/19/2010	6:26:54 PM	BCl3 MFC set to  0.000000
3/19/2010	6:26:54 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:26:54 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:26:54 PM	Tube furnace set to 0
3/19/2010	6:26:56 PM	Helium valve closed
3/19/2010	6:26:56 PM	H2 valve closed
3/19/2010	6:26:56 PM	BCl3 valve closed
3/19/2010	6:26:56 PM	PH3 valve closed
3/19/2010	6:26:56 PM	SiCl4 pre valve closed
3/19/2010	6:26:56 PM	SiCl4 post valve closed
3/19/2010	6:26:56 PM	Main Vac valve closed
3/19/2010	6:26:56 PM	Bypass valve closed
3/19/2010	6:26:56 PM	Bubbler valve closed
3/19/2010	6:26:56 PM	Helium MFC set to  0.000000
3/19/2010	6:26:56 PM	H2 MFC set to  0.000000
3/19/2010	6:26:56 PM	BCl3 MFC set to  0.000000
3/19/2010	6:26:56 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:26:56 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:26:56 PM	Tube furnace set to 0
3/19/2010	6:27:12 PM	Helium valve closed
3/19/2010	6:27:12 PM	H2 valve closed
3/19/2010	6:27:12 PM	BCl3 valve closed
3/19/2010	6:27:12 PM	PH3 valve closed
3/19/2010	6:27:12 PM	SiCl4 pre valve closed
3/19/2010	6:27:12 PM	SiCl4 post valve closed
3/19/2010	6:27:12 PM	Main Vac valve closed
3/19/2010	6:27:12 PM	Bubbler valve closed
3/19/2010	6:27:12 PM	Bypass valve opened
3/19/2010	6:27:12 PM	Helium MFC set to  0.000000
3/19/2010	6:27:12 PM	H2 MFC set to  0.000000
3/19/2010	6:27:12 PM	BCl3 MFC set to  0.000000
3/19/2010	6:27:12 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:27:12 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:27:12 PM	Tube furnace set to 0
3/19/2010	6:27:41 PM	Helium valve closed
3/19/2010	6:27:41 PM	H2 valve closed
3/19/2010	6:27:41 PM	BCl3 valve closed
3/19/2010	6:27:41 PM	PH3 valve closed
3/19/2010	6:27:41 PM	SiCl4 pre valve closed
3/19/2010	6:27:41 PM	SiCl4 post valve closed
3/19/2010	6:27:41 PM	Bubbler valve closed
3/19/2010	6:27:41 PM	Main Vac valve opened
3/19/2010	6:27:41 PM	Bypass valve opened
3/19/2010	6:27:41 PM	Helium MFC set to  0.000000
3/19/2010	6:27:41 PM	H2 MFC set to  0.000000
3/19/2010	6:27:41 PM	BCl3 MFC set to  0.000000
3/19/2010	6:27:41 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:27:41 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:27:41 PM	Tube furnace set to 0
3/19/2010	6:32:41 PM	H2 valve closed
3/19/2010	6:32:41 PM	BCl3 valve closed
3/19/2010	6:32:41 PM	PH3 valve closed
3/19/2010	6:32:41 PM	SiCl4 pre valve closed
3/19/2010	6:32:41 PM	SiCl4 post valve closed
3/19/2010	6:32:41 PM	Main Vac valve closed
3/19/2010	6:32:41 PM	Bypass valve closed
3/19/2010	6:32:41 PM	Bubbler valve closed
3/19/2010	6:32:41 PM	Helium valve opened
3/19/2010	6:32:41 PM	Helium MFC set to  500.000000
3/19/2010	6:32:41 PM	H2 MFC set to  0.000000
3/19/2010	6:32:41 PM	BCl3 MFC set to  0.000000
3/19/2010	6:32:41 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:32:41 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:32:41 PM	Tube furnace set to 0
3/19/2010	6:34:02 PM	Helium valve closed
3/19/2010	6:34:02 PM	H2 valve closed
3/19/2010	6:34:02 PM	BCl3 valve closed
3/19/2010	6:34:02 PM	PH3 valve closed
3/19/2010	6:34:02 PM	SiCl4 pre valve closed
3/19/2010	6:34:02 PM	SiCl4 post valve closed
3/19/2010	6:34:02 PM	Main Vac valve closed
3/19/2010	6:34:02 PM	Bypass valve closed
3/19/2010	6:34:02 PM	Bubbler valve closed
3/19/2010	6:34:02 PM	Helium MFC set to  0.000000
3/19/2010	6:34:02 PM	H2 MFC set to  0.000000
3/19/2010	6:34:02 PM	BCl3 MFC set to  0.000000
3/19/2010	6:34:02 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:34:02 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:34:02 PM	Tube furnace set to 0
3/19/2010	6:34:17 PM	Helium valve closed
3/19/2010	6:34:17 PM	H2 valve closed
3/19/2010	6:34:17 PM	BCl3 valve closed
3/19/2010	6:34:17 PM	PH3 valve closed
3/19/2010	6:34:17 PM	SiCl4 pre valve closed
3/19/2010	6:34:17 PM	SiCl4 post valve closed
3/19/2010	6:34:17 PM	Main Vac valve closed
3/19/2010	6:34:17 PM	Bubbler valve closed
3/19/2010	6:34:17 PM	Bypass valve opened
3/19/2010	6:34:17 PM	Helium MFC set to  0.000000
3/19/2010	6:34:17 PM	H2 MFC set to  0.000000
3/19/2010	6:34:17 PM	BCl3 MFC set to  0.000000
3/19/2010	6:34:17 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:34:17 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:34:17 PM	Tube furnace set to 0
3/19/2010	6:34:39 PM	Helium valve closed
3/19/2010	6:34:39 PM	H2 valve closed
3/19/2010	6:34:39 PM	BCl3 valve closed
3/19/2010	6:34:39 PM	PH3 valve closed
3/19/2010	6:34:39 PM	SiCl4 pre valve closed
3/19/2010	6:34:39 PM	SiCl4 post valve closed
3/19/2010	6:34:39 PM	Bubbler valve closed
3/19/2010	6:34:39 PM	Main Vac valve opened
3/19/2010	6:34:39 PM	Bypass valve opened
3/19/2010	6:34:39 PM	Helium MFC set to  0.000000
3/19/2010	6:34:39 PM	H2 MFC set to  0.000000
3/19/2010	6:34:39 PM	BCl3 MFC set to  0.000000
3/19/2010	6:34:39 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:34:39 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:34:39 PM	Tube furnace set to 0
3/19/2010	6:39:40 PM	H2 valve closed
3/19/2010	6:39:40 PM	BCl3 valve closed
3/19/2010	6:39:40 PM	PH3 valve closed
3/19/2010	6:39:40 PM	SiCl4 pre valve closed
3/19/2010	6:39:40 PM	SiCl4 post valve closed
3/19/2010	6:39:40 PM	Main Vac valve closed
3/19/2010	6:39:40 PM	Bypass valve closed
3/19/2010	6:39:40 PM	Bubbler valve closed
3/19/2010	6:39:40 PM	Helium valve opened
3/19/2010	6:39:40 PM	Helium MFC set to  500.000000
3/19/2010	6:39:40 PM	H2 MFC set to  0.000000
3/19/2010	6:39:40 PM	BCl3 MFC set to  0.000000
3/19/2010	6:39:40 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:39:40 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:39:40 PM	Tube furnace set to 0
3/19/2010	6:41:01 PM	Helium valve closed
3/19/2010	6:41:01 PM	H2 valve closed
3/19/2010	6:41:01 PM	BCl3 valve closed
3/19/2010	6:41:01 PM	PH3 valve closed
3/19/2010	6:41:01 PM	SiCl4 pre valve closed
3/19/2010	6:41:01 PM	SiCl4 post valve closed
3/19/2010	6:41:01 PM	Main Vac valve closed
3/19/2010	6:41:01 PM	Bypass valve closed
3/19/2010	6:41:01 PM	Bubbler valve closed
3/19/2010	6:41:01 PM	Helium MFC set to  0.000000
3/19/2010	6:41:01 PM	H2 MFC set to  0.000000
3/19/2010	6:41:01 PM	BCl3 MFC set to  0.000000
3/19/2010	6:41:01 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:41:01 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:41:01 PM	Tube furnace set to 0
3/19/2010	6:41:16 PM	Helium valve closed
3/19/2010	6:41:16 PM	H2 valve closed
3/19/2010	6:41:16 PM	BCl3 valve closed
3/19/2010	6:41:16 PM	PH3 valve closed
3/19/2010	6:41:16 PM	SiCl4 pre valve closed
3/19/2010	6:41:16 PM	SiCl4 post valve closed
3/19/2010	6:41:16 PM	Main Vac valve closed
3/19/2010	6:41:16 PM	Bubbler valve closed
3/19/2010	6:41:16 PM	Bypass valve opened
3/19/2010	6:41:16 PM	Helium MFC set to  0.000000
3/19/2010	6:41:16 PM	H2 MFC set to  0.000000
3/19/2010	6:41:16 PM	BCl3 MFC set to  0.000000
3/19/2010	6:41:16 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:41:16 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:41:16 PM	Tube furnace set to 0
3/19/2010	6:41:38 PM	Helium valve closed
3/19/2010	6:41:38 PM	H2 valve closed
3/19/2010	6:41:38 PM	BCl3 valve closed
3/19/2010	6:41:38 PM	PH3 valve closed
3/19/2010	6:41:38 PM	SiCl4 pre valve closed
3/19/2010	6:41:38 PM	SiCl4 post valve closed
3/19/2010	6:41:38 PM	Bubbler valve closed
3/19/2010	6:41:38 PM	Main Vac valve opened
3/19/2010	6:41:38 PM	Bypass valve opened
3/19/2010	6:41:38 PM	Helium MFC set to  0.000000
3/19/2010	6:41:38 PM	H2 MFC set to  0.000000
3/19/2010	6:41:38 PM	BCl3 MFC set to  0.000000
3/19/2010	6:41:38 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:41:38 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:41:38 PM	Tube furnace set to 0
3/19/2010	6:46:39 PM	Helium valve closed
3/19/2010	6:46:39 PM	H2 valve closed
3/19/2010	6:46:39 PM	BCl3 valve closed
3/19/2010	6:46:39 PM	PH3 valve closed
3/19/2010	6:46:39 PM	SiCl4 pre valve closed
3/19/2010	6:46:39 PM	SiCl4 post valve closed
3/19/2010	6:46:39 PM	Bubbler valve closed
3/19/2010	6:46:39 PM	Main Vac valve opened
3/19/2010	6:46:39 PM	Bypass valve opened
3/19/2010	6:46:39 PM	Helium MFC set to  0.000000
3/19/2010	6:46:39 PM	H2 MFC set to  0.000000
3/19/2010	6:46:39 PM	BCl3 MFC set to  0.000000
3/19/2010	6:46:39 PM	SiCl4 MFC set to  0.000000
3/19/2010	6:46:39 PM	Bypass solenoid MFC set to  0.000000
3/19/2010	6:46:39 PM	Tube furnace set to 0
3/19/2010	6:46:40 PM	Run finished at 6:46 PM
3/19/2010	6:46:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
